Waferpedia

Tool family

YES PB12

YESThermal / Diffusion1 entry

The YES PB12 is identified in the PB-HV Series manual-load high vacuum ovens as a PB12 High Vac Specs model for wafers up to 300 mm.

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Models in this family

  1. PB12

    The YES PB12 is a PB-HV Series manual-load high vacuum oven, stated to support up to 300 mm wafers and to be designed for MEMS and semiconductor process applications.

    Cited variants

    DesignationGenerationVintageChangesSource
    YES-PB8 High Vac Specs——up to 200mm wafersweb.archive.org[1]
    YES-PB12 High Vac Specs——up to 300mm wafersweb.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org