Waferpedia

Tool family

Zygo PTI 250

Models in this family

  1. Cited variants

    DesignationGenerationVintageChangesSource
    PTI 250RS——Research-grade with high functionality and flexibility. Uses FlashPhase data acquisition, accuracy better than λ/100, MetroPro interface, optional radius measurement.shdooz.com[1]
    PTI 250F——Economical production phase-modulated interferometer. Uses FlashPhase, produces >300,000 pixel quantitative surface maps, MetroPro software, optional radius measurement.shdooz.com[1]
    PTI 250P——Production phase-modulated interferometer. Produces >300,000 pixel quantitative surface maps, accuracy better than λ/100, MetroPro software with multi-language support, optional radius measurement.shdooz.com[1]
    PTI 250V——Production rapid inspection interferometer. Uses fringe-viewing method, optional radius measurement, can be upgraded to PTI 250F and PTI 250P.shdooz.com[1]
    PTI 250FTM——No further description provided in source.shdooz.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]shdooz.comshdooz.com