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Advanced Energy

MDX-L12

Advanced Energy MDX-L12 family
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The Advanced Energy MDX-L12 is a 12 kW class DC magnetron power supply from the MDX-L series. The MDX-L12 provides regulated DC power for magnetron sputtering and other plasma-based thin-film deposition processes. The MDX-L12 is designed for use in semiconductor, optical coating, and industrial surface treatment systems.[1][2]

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What it is

The Advanced Energy MDX-L12 is a DC magnetron power supply. The MDX-L12 belongs to the MDX-L series of magnetron drive power supplies. The MDX-L12 is a 12 kW class power supply designed for sputtering and plasma applications.[3][4][1][2]

How it works

The MDX-L12 features fast arc response and precise power control. The MDX-L12 includes digital control and multiple interface options such as RS-232, GPIB, and analog. The MDX-L12 has comprehensive protection circuits. The MDX-L12 delivers stable, regulated DC power. The MDX-L12 employs advanced arc extinguishing technology to reduce the impact of arc discharge. The MDX-L12 produces low output ripple to ensure coating uniformity.[1][2]

Where it fits in the process flow

The MDX-L12 is used as a power source for magnetron sputtering systems. The MDX-L12 can serve as a bias power supply in RF sputtering and etching systems.[2]

Applications

The MDX-L12 is applied in magnetron sputtering for semiconductor manufacturing, optical coating, and decorative coating. The MDX-L12 is used in laboratory research applications.[1][2]

What do the numbers mean?

Power & electrical3

Output Power
12 kW[1]
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Type
DC Magnetron Power Supply[1]
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Core Function
High-power DC magnetron power supply for plasma and thin-film processes[1]
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Control & software1

Control Interfaces
RS-232, GPIB, analog[1]
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Configuration & options6

Part Number
3152313-000C[3]
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Model Number
3152313-000 B[4]
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Series
MDX-L[1]
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Part Number (variant A)
3152313-000C[3]
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Part Number (variant B)
3152313-000 B[4]
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Condition
New Original (New Surplus)[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Output Power12 kW[1]
  • TypeDC Magnetron Power Supply[1]
  • Core FunctionHigh-power DC magnetron power supply for plasma and thin-film processes[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the power rating of the MDX-L12?

The MDX-L12 is a 12 kW class power supply, providing up to 12 kW of power output.[1][2]

What series does the MDX-L12 belong to?

The MDX-L12 is part of the MDX-L series.[1]

What interface options does the MDX-L12 support?

The MDX-L12 supports RS-232, GPIB, and analog control interfaces.[1]

What are the key features of the MDX-L12?

Key features include precise current, voltage, and power regulation, advanced arc extinguishing technology, low output ripple, and a compact design.[2]

What are the primary applications of the MDX-L12?

The MDX-L12 is used for magnetron sputtering in semiconductor, optical, and decorative coating, as a bias power supply, and in laboratory research.[2]

Not publicly documented

The following facts about the MDX-L12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MDX-L12 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MDX-L12 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MDX-L12 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MDX-L12 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MDX-L12 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]rsdcsplc.com — rsdcsplc.comrsdcsplc.com
  2. [2]AE MDX-L12 DC Generator — stockdcs.comstockdcs.com
  3. [3]dealer listingfabsurplus.com
  4. [4]dealer listingfabsurplus.com
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Last updated Sep 30, 2026.

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