Waferpedia

Applied Materials

Producer GT APF

DepositionApplied Materials Producer family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Producer GT APF — Inventory photo
Fig. 01Producer GT APFInventory photo[1]

What it is

The Producer GT APF is manufactured by Applied Materials. The system is configured for 300 mm wafer processing. The system features multiple APF TWIN chambers for deposition. The system supports a variety of process gases including C3H6, C2H2, H2, He, NF3, O2, Ar, and N2.[2][3][4]

How it works

The Producer GT APF uses APF TWIN chambers. Each chamber is configured with specific gas delivery lines and flow controllers. The system has a loading configuration of three load ports and seven cooling stations for a 25-wafer FOUP.[2]

Where it fits in the process flow

The Producer GT APF deposits advanced patterning film (APF) for lithographic patterning. The system can deposit films using precursors such as C3H6 and C2H2 for carbon-based hardmask layers.[2][3]

What do the numbers mean?

Power & electrical1

Power Rating
110 AC 3-Phase for system[2]
Accurate?

Wafer handling2

Wafer Size
300 mm[2]
Accurate?
Loading Configuration
3 LP / 7 cooling station / 25 wafer FOUP[2]
Accurate?

Gas & chemistry2

Process Gases
C3H6, C2H2, H2, He (HI/LO), NF3, O2, Ar (HI/LO), N2[2]
Accurate?
Optional Gas Flows
NF3 1000 sccm, C3H6 3000 sccm, C2H2 4000 sccm, H2 10000 sccm, Ar 15000 sccm, O2 15000 sccm, He 5000 sccm[2]
Accurate?

Control & software1

Software Version
pmB5.4_135[2]
Accurate?

Configuration & options2

HDD not included[1]
Accurate?
Chamber Configuration
APF TWIN Chamber (3 chambers)[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power Rating110 AC 3-Phase for system[2]
  • Process GasesC3H6, C2H2, H2, He (HI/LO), NF3, O2, Ar (HI/LO), N2[2]
  • Optional Gas FlowsNF3 1000 sccm, C3H6 3000 sccm, C2H2 4000 sccm, H2 10000 sccm, Ar 15000 sccm, O2 15000 sccm, He 5000 sccm[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the Producer GT APF support?

The Producer GT APF is configured for 300 mm wafer processing.[2][3][4]

What process gases are used in the Producer GT APF?

The system uses gases including C3H6, C2H2, H2, He, NF3, O2, Ar, and N2.[2]

What is the loading configuration of the system?

The system uses a loading configuration with three load ports, seven cooling stations, and a 25-wafer FOUP.[2]

Not publicly documented

The following facts about the Producer GT APF are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Producer GT APF are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Producer GT APF are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Producer GT APF are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Producer GT APF are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Producer GT APF is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]macquarie.com — macquarie.commacquarie.com
  3. [3]Applied Materials Producer GT APF CVD Advanced Patterning Film for sale — fabsurplus.comfabsurplus.com
  4. [4]Applied Materials Producer GT APF PECVD (Chemical Vapor Deposition) for sale — fabsurplus.comfabsurplus.com
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Last updated Sep 22, 2026.

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