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Applied Materials

Producer GT DARC

DepositionApplied Materials Producer family
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Producer GT DARC — Inventory photo
Fig. 01Producer GT DARCInventory photo[1]

Power

Advanced Energy /PDX 900 Power Supply (x6)[1]

Gas delivery

SiH4, N2O, NH3[1]

What is it?

Applied Materials Producer GT DARC is a PECVD (Plasma-Enhanced Chemical Vapor Deposition) system.

What do the numbers mean?

Power & electrical6

Advanced Energy Apex 3013 Power Supply (x6)[1]
Accurate?
Advanced Energy /PDX 900 Power Supply (x6)[1]
Accurate?
MKS Astron 2L Power supply (x6)[1]
Accurate?
Power supply type 1
Advanced Energy Apex 3013 (x6)[1]
Accurate?
Power supply type 2
Advanced Energy /PDX 900 (x6)[1]
Accurate?
Power supply type 3
MKS Astron 2L (x6)[1]
Accurate?

Gas & chemistry2

Gas
SiH4, N2O, NH3[1]
Accurate?
Process gases
SiH4, N2O, NH3[1]
Accurate?

Configuration & options7

3 Channels[1]
Accurate?
FOUP Ports
4[1]
Accurate?
SMC HRW008-H1S-DY-X007 Chiller[1]
Accurate?
Number of channels
3[1]
Accurate?
Number of FOUP ports
4[1]
Accurate?
Chiller model
SMC HRW008-H1S-DY-X007[1]
Accurate?
Vintage
2016[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • GasSiH4, N2O, NH3[1]
  • ConfigurationAdvanced Energy Apex 3013 Power Supply (x6)[1]
  • ConfigurationAdvanced Energy /PDX 900 Power Supply (x6)[1]
  • ConfigurationMKS Astron 2L Power supply (x6)[1]
  • Process gasesSiH4, N2O, NH3[1]
  • Power supply type 1Advanced Energy Apex 3013 (x6)[1]
  • Power supply type 2Advanced Energy /PDX 900 (x6)[1]
  • Power supply type 3MKS Astron 2L (x6)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

How many FOUP ports does the system have?

The system has 4 FOUP ports.[1][2]

What power supplies are used in the Producer GT DARC?

The system uses six Advanced Energy Apex 3013 power supplies, six Advanced Energy /PDX 900 power supplies, and six MKS Astron 2L power supplies.[1][2]

Not publicly documented

The following facts about the Producer GT DARC are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Producer GT DARC are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Producer GT DARC are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Producer GT DARC are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Producer GT DARC are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Producer GT DARC is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Producer GT DARC — Applied Materials | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 7, 2026.

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