ASM
Sonora Vertical
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The ASM Sonora Vertical is a vertical furnace system with dual reactor chambers for 300mm wafers. The Sonora Vertical uses dual boat reactors to achieve the highest available throughput in its class, increasing reactor utilization to virtually 100%. The Sonora Vertical supports low pressure chemical vapor deposition processes like doped silicon and silicon nitride films, diffusion processes such as wet oxidation and anneal processes, and a portfolio of atomic layer deposition materials.[1]
What it is
The Sonora model was introduced in July 2022. The system processes 300 mm (12 inch) wafers. The Sonora features dual reactor chambers to increase throughput. The Sonora is compatible with the earlier A412 vertical furnace system, allowing recipe transfer.[1][2]
How it works
General reference — not yet source-verifiedVertical furnaces load wafers into vertical quartz boats and insert them into a heated vertical tube. The furnace heats the wafers to process temperatures while gases flow over the wafer surfaces to drive chemical reactions such as oxidation or dopant diffusion. Process control is maintained by precise temperature profiling and gas flow regulation.
Applications
The Sonora Vertical is used in the manufacturing of advanced logic devices and power semiconductor devices.[1]
What do the numbers mean?
Vacuum & pumping1
- Gas injection system
- Innovative gas injection system for low pressure processing providing best uniformities between wafers at larger load sizes[1]
Wafer handling5
Performance1
- Throughput
- Highest available throughput in its class; 30% more productivity than predecessor[1]
Control & software2
Configuration & options5
- Process capabilities
- LPCVD (doped silicon, silicon nitride), diffusion (wet oxidation, anneal), ALD[1]
Vintage & configurations
- 2022Product launch announcement[1]
ASM International N.V. announced the SONORA vertical furnace system on July 12, 2022.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Gas injection systemInnovative gas injection system for low pressure processing providing best uniformities between wafers at larger load sizes[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Sonora Vertical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the Sonora Vertical are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Sonora Vertical are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Sonora Vertical are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Sonora Vertical is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Sonora Vertical are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]uk.marketscreener.com — uk.marketscreener.comuk.marketscreener.com
- [2]Equipment inventory listing
Last updated Sep 23, 2026.
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