ASML
Twinscan AT 1100
What it is
How it works
The Twinscan AT 1100 uses a Carl Zeiss Star Lith 1100 projection optical system with a numerical aperture of 0.75. The system achieves a resolution of 100 nm. The system incorporates dual wafer stage technology. The machine processes 93 wafers per hour for 300 mm wafers. Overlay accuracy is less than 20 nm at full throughput. The system is equipped with a 4 kHz ArF laser that supports precise critical dimension control.[2]
Where it fits in the process flow
The Twinscan AT 1100 is suitable for mass production of 100 nm processes. The system can also be used for pre-production research and development of more advanced process nodes.[2]
Applications
The Twinscan AT 1100 is widely used in the manufacturing of logic chips and memory chips. The system is designed for high-volume production environments.[2]
What do the numbers mean?
Power & electrical6
- 50/60 Hz[1]
Wafer handling3
Optics & imaging5
Control & software2
- With HDD & Software[1]
Configuration & options1
- Cymer NL 7600 A[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Twinscan AT 1100 handle?
The Twinscan AT 1100 processes 200 mm (8 inch) and 300 mm (12 inch) wafers.[1][2]
What is the resolution of the Twinscan AT 1100?
The Twinscan AT 1100 achieves a resolution of 100 nm.[2]
What is the overlay accuracy of the Twinscan AT 1100?
The overlay accuracy is less than 20 nm at full throughput.[2]
What is the throughput of the Twinscan AT 1100?
The system processes 93 wafers per hour for 300 mm wafers.[2]
What is the numerical aperture of the projection optics in the Twinscan AT 1100?
The projection optical system has a numerical aperture of 0.75.[2]
Not publicly documented
The following facts about the Twinscan AT 1100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Twinscan AT 1100 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Twinscan AT 1100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Twinscan AT 1100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twinscan AT 1100 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Twinscan AT 1100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]his-tek.com — his-tek.comhis-tek.com
- [3]ASML TWINSCAN AT:1100 ArF Scanner Wafer Stepper | ASML | DS Semiconductor — ds-semiconductor.comds-semiconductor.com
Last updated Sep 24, 2026.
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