ASML
Twinscan XT 1950 Hi
The Twinscan XT 1950 Hi is a scanner for 12-inch wafers used for 193 nm immersion lithography with 38 nm resolution capacity. The Twinscan XT 1950 Hi has an overlay of 4 nm SMO / 7 nm MMO and a throughput of 148 wph. The Twinscan XT 1950 Hi uses a Zeiss Starlith 1950 with max NA of 1.35 or equivalent illumination system.[1][2]
Wafer size
300mm
Power
60 W / 6 khz Laser[1]
Performance
1950 Hi Additional Options[1]
Optics
38 nm Overlay: 4 nm SMO / 7 nm MMO[1]
What is it?
What do the numbers mean?
Power & electrical2
Wafer handling2
- Additional options
- Water Cooling for Electronics Cabinet; Customized Illumination; Multiple DOEs; Integrated Reticle Library IRL-XP for H-SPEC Systems; Integrated Reticle Inspection System IRIS-XT; Reticle Streaming: Spotless G & H; GridMapper Twinscan; FSM Flex Package for Twinscan; Aux Port 300 mm FOUP / 25 Wafer; Smash XY Reticles: -40 nm Defect, Single Lot Tst Overlay[1]
Optics & imaging19
- Zeiss Starlith 1950 with max NA of 1.35 or equivalent illumination system[1]
- Aerial XP illumination system[1]
- P Type illuminator alignment[1]
- Focus and field by field leveling reticle management[1]
- Load Ports Laser[1]
- 193 nm[1]
- Standard capabilities
- Focus Spot Monitoring; Circuit Dependent Focus Edge Clearance; CD-FEC; Dual E-Chucks (bonded SiSiC); Image Streaming; Lot Streaming & LS Match 2 (XT); Lot Overhead Reduction 1 & 2; Productivity Enhancement Package PEP XT: 1950 Hi; In-Situ Metrology (ILIAS Software & Sensor); LithoGuide ILIAS (SAMOS & PUPICON); UNICOM XT; DoesMapper ArF; QUASAR XL (15 slot); Reticle Shape Correction; 2DE Grind Calibration; Twinscan Overlay Package TOP XT: 1950 Hi[1]
Performance3
- Blue alignment - Blue align with Athena narrow marks leveling[1]
Dimensions & facilities1
- Circuit Dependent Focus Edge Clearance[1]
Configuration & options12
- HDD included[1]
- Key Specifications:[1]
- Class 1 environment with semi compliant MENV & FIMS assemblies controls[1]
- UNIX / SUN architecture[1]
- Cymer XLR 560 i:[1]
- With E 95 bandwith monitoring environment[1]
- Standard Capabilities:[1]
- Focus Spot Monitoring[1]
- Power Conditioner
- 135 kVA Power Conditioning & Distribution Unit (Teal Model PCDU-XT 1900)[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the throughput of the Twinscan XT 1950 Hi?
The throughput is 148 wph for 300 mm wafers with 125 exposures at 30 mJ.[1][2]
Not publicly documented
The following facts about the Twinscan XT 1950 Hi are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Twinscan XT 1950 Hi are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Twinscan XT 1950 Hi are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Twinscan XT 1950 Hi are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twinscan XT 1950 Hi are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Twinscan XT 1950 Hi is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Inventory photo
Last updated Sep 23, 2026.
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