Waferpedia

Axcelis

NV 6200

Ion ImplantationAxcelis NV 6200 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

NV 6200 — Inventory photo
Fig. 01NV 6200Inventory photo[1]

What it is

The Axcelis NV 6200 is an ion implanter used in semiconductor manufacturing. The Axcelis NV 6200 A Ion is a variant of the NV 6200 series of ion implantation equipment. Axcelis is the manufacturer of the NV 6200 and the NV 6200 A Ion implanter.[1][3]

Where it fits in the process flow

The Axcelis NV 6200 supports six-inch (150 mm) wafers. The NV 6200 A Ion variant is also categorized as an ion implanter, used for the same class of doping applications.[1][3]

Applications

General reference — not yet source-verified

Ion implanters are applied to introduce controlled amounts of dopant impurities into semiconductor wafers for the formation of conductive regions in devices such as transistors, diodes, and memory cells. The Axcelis NV 6200, as an ion implanter, is used for this doping process in the fabrication of integrated circuits.

What do the numbers mean?

Wafer handling1

Wafer size
6 inch[1]
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Configuration & options4

Manufacturer
Axcelis[1]
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Model
NV 6200[1]
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Category
Ion Implantation[2]
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Equipment type
Ion implanter[1]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
NV 6200 A Ion———waferpedia.com[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Axcelis NV 6200?

The Axcelis NV 6200 is an ion implanter.[1][2]

What wafer sizes does the Axcelis NV 6200 support?

The Axcelis NV 6200 supports six-inch (150 mm) wafers.[1]

What is the Axcelis NV 6200 A Ion?

The Axcelis NV 6200 A Ion is an ion implanter made by Axcelis.[3]

Not publicly documented

The following facts about the NV 6200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV 6200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the NV 6200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NV 6200 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NV 6200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the NV 6200 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 8, 2026.

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