Waferpedia

Axcelis

NV 8200 P

Ion ImplantationAxcelis NV 8200 P family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

AxcelisNV 8200 P
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What it is

General reference — not yet source-verified

Ion implantation is a process used in semiconductor manufacturing to introduce dopant atoms into a silicon wafer. An ion implanter accelerates a beam of ionized dopant species to a controlled energy and directs it at the wafer surface. The depth of penetration is determined by the acceleration energy, and the dose is controlled by the beam current and exposure time.

Applications

General reference — not yet source-verified

Common applications include forming P-type and N-type wells, source/drain extensions, and deep source/drain regions. The medium current capability allows for precise dose control in applications that require moderate doping concentrations.

What do the numbers mean?

Wafer handling1

Wafer sizes
6 inch[2]
Accurate?

Configuration & options3

Category
Ion Implantation[1]
Accurate?
Model listing
Axcelis NV 8200 P Implanter[2]
Accurate?
Model listing
AXCELIS MEDIUM CURRENT NV8200[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of ion implanter is the Axcelis NV 8200 P?

The Axcelis NV 8200 P is a medium current ion implanter.[3]

Which company manufactures the NV 8200 P?

The NV 8200 P is manufactured by Axcelis Technologies.[2][3]

Not publicly documented

The following facts about the NV 8200 P are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV 8200 P are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NV 8200 P are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NV 8200 P are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NV 8200 P are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NV 8200 P is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]surplus.infineon.com — surplus.infineon.comsurplus.infineon.com
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Last updated Sep 24, 2026.

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