Canon
MPA 600 FA
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Canon MPA 600 FA is a 1X mirror projection mask aligner. Canon MPA 600 FA supports single or double cassette-to-cassette backside wafer handling. Canon MPA 600 FA supports 4 inch, 5 inch, and 6 inch wafers.[1]
Power
2 kW high pressure mercury lamp[1]
Performance
Spot beam / sheet beam[1]
Gas delivery
1.5 um (using positive resist)[1]
Optics
5 inch, 6 inch, 7 inch[1]
What it is
The Canon MPA 600 FA is a mirror projection mask aligner for semiconductor photolithography. The MPA 600 FA is a Canon tool in the MPA 600 family.[2][3][4][5]
What do the numbers mean?
Power & electrical3
- Intensity
- At 1800 watts power output: 4 inch wafer more than 700 mW, 5 inch wafer more than 650 mW, 6 inch wafer more than 600 mW[1]
- Required facilities
- 200 VAC, 3Phase, 6 kVA, 50/60Hz; Air Supply(CTC): 200 VAC, 3Phase, 8 kVA, 50/60Hz; CDA pressure minimum 6.5 kg/cm2, flow rate 130 lit/min; Vacuum 50 cmHg or more; Exhaust flow for illuminator 6.5 m/sec to 9.5 m/sec[1]2 sources
Wafer handling4
Gas & chemistry1
Optics & imaging6
Performance2
Control & software2
- Constant temperature control
- Monitors and controls system temperature within plus/minus 0.3 degrees C[1]2 sources
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Resolution1.5 um (using positive resist)[1]
- Illumination2 kW high pressure mercury lamp[1]
- IntensityAt 1800 watts power output: 4 inch wafer more than 700 mW, 5 inch wafer more than 650 mW, 6 inch wafer more than 600 mW[1]
- Required facilities200 VAC, 3Phase, 6 kVA, 50/60Hz; Air Supply(CTC): 200 VAC, 3Phase, 8 kVA, 50/60Hz; CDA pressure minimum 6.5 kg/cm2, flow rate 130 lit/min; Vacuum 50 cmHg or more; Exhaust flow for illuminator 6.5 m/sec to 9.5 m/sec[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the MPA 600 FA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MPA 600 FA are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MPA 600 FA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MPA 600 FA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MPA 600 FA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MPA 600 FA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]servtechinc.com — servtechinc.comservtechinc.com
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]Canon MPA 600FA - Mirror Projection Aligner | SemiStar — semistarcorp.comsemistarcorp.com
- [5]Canon MPA 600FA - Mirror Projection Aligner | SemiStar — semistarcorp.comsemistarcorp.com
Last updated Oct 11, 2026.