Waferpedia

Cascade Microtech

Elite 300

Cascade Microtech Elite 300 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Cascade Microtech Elite 300 is a semi-automatic wafer probe station platform. The Elite 300 handles 12-inch wafers and includes MicroChamber, AttoGuard, and PureLine technologies. The Elite 300 also features a precision low-noise femtoguard temperature chuck.[1][2]

Elite 300 — Inventory photo
Fig. 01Elite 300Inventory photo[3]

Performance

Precision Low Noise[2]

Optics

10X Mitutoyo Plan Apo Objective[4]

What it is

The Elite 300 is a semiautomatic probe station platform that supports twelve-inch wafers. The system includes a MicroChamber for environmental isolation, a nickel-plated aluminum chuck, and temperature control provided by an ATT C60-60 cooling unit and an ATT CMI temperature control unit. The station is equipped with an eVue III pro digital microscope and a ten-times Mitutoyo Plan Apo objective for alignment and inspection. The platform runs Velox 3.2 software.[4][1][2]

What do the numbers mean?

Wafer handling4

Wafer size
12 inch[2]
Accurate?
Chuck material
Nickel plated aluminum[4]
Accurate?
Chuck type
Femtoguard temperature chuck[2]
Accurate?
Chuck
precision low-noise Femtoguard temperature chuck[2]
Accurate?

Optics & imaging1

Objective
10X Mitutoyo Plan Apo Objective[4]
Accurate?

Performance1

Performance
Precision Low Noise[2]
Accurate?

Control & software2

Software
Velox 3.2[4]
Accurate?
Temperature control unit
ATT CMI Temp Control Unit[4]
Accurate?

Configuration & options10

Microscope
eVue III pro Digital Microscope[4]
Accurate?
Microchamber
Included[1]
Accurate?
Cooling unit
ATT C60-60 Cooling Unit[4]
Accurate?
Automation
Semi-automatic[1]
Accurate?
Automation
Automated[2]
Accurate?
AttoGuard
Included[1]
Accurate?
PureLine
Included[1]
Accurate?
Platform type
probe station platform[1]
Accurate?
Operation
semi-automatic[1]
Accurate?
Technologies
MicroChamber, AttoGuard, and PureLine technologies[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
ELITE 300/AP———electronicsdatasheets.com[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of machine is the Elite 300?

The Elite 300 is a probe station platform for semiconductor test and probe work.[1]

Not publicly documented

The following facts about the Elite 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Elite 300 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Elite 300 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Elite 300 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Elite 300 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Elite 300 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]electronicsdatasheets.com — electronicsdatasheets.comelectronicsdatasheets.com
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Inventory photo
  4. [4]Inventory photo
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Last updated Oct 7, 2026.

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