CHA
1000 E-Beam
The CHA 1000 E-Beam is a deposition evaporator. The CHA 1000 E-Beam includes a 24 x 30" stainless steel bell jar. The CHA 1000 E-Beam includes a CTI 10 cryopump with lines, cable and compressor.[1][2]
What it is
The CHA 1000 E-Beam is an electron-beam deposition system in the CHA 1000 family.[2]
The CHA 1000 E-Beam evaporator is an e-beam evaporator platform with a 24 by 30 inch stainless steel bell jar, a 4 pocket gun, a lift off dome, a CTI 10 cryopump with lines, cable and compressor, a two stage direct drive roughing pump, a new touch screen valve controller, a new ion and thermocouple gauge, and a new thickness monitor.[1][2]
How it works
Where it fits in the process flow
General reference — not yet source-verifiedThe CHA 1000 E-Beam sits in the physical vapor deposition stage of a semiconductor process flow.
The CHA 1000 E-Beam is used after substrate preparation and before later patterning or integration steps that require deposited thin films.
Applications
What do the numbers mean?
Vacuum & pumping4
Control & software2
- New touch screen valve controller (1 year warranty)[1]
Configuration & options14
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 1000 E-Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1000 E-Beam are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 1000 E-Beam are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1000 E-Beam are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1000 E-Beam are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1000 E-Beam is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]CHA SE-1000 E-Beam Evaporator Deposition System | SemiStar — semistarcorp.comsemistarcorp.com
Last updated Oct 5, 2026.
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