Comdel

CLX 10 K

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The Comdel CLX 10 K is a low frequency RF power generator. The Comdel CLX 10 K has a power output of 10 kW. The Comdel CLX 10 K is a 3U rackmount unit with water cooling.^[1]

ComdelCLX 10 K

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Power

Low Frequency RF Power Generator^[1]

Vacuum

552 kPa^[1]

What it is

The Comdel CLX 10 K is a low frequency RF power generator.^[1]^[3]

How it works

The CLX 10 K uses water cooling, rear-panel RF output, and a rear-panel remote interface.^[1]

Where it fits in the process flow

The CLX 10 K sits in the equipment layer that supplies RF power to semiconductor process chambers and similar industrial systems.^[1]

Applications

The CLX 10 K is used in semiconductor manufacturing equipment.^[1]

The CLX 10 K is used in plasma processing systems and other industrial RF applications.^[1]

What do the numbers mean?

Power & electrical3

Type: Low Frequency RF Power Generator^[1]2 sources
Power Output: 10 kW^[1]2 sources
RF Output Connector: BNC connector (rear panel)^[1]2 sources

Vacuum & pumping1

Maximum Water Pressure: 552 kPa^[1]2 sources

Control & software1

Remote Interface: D-Sub connector (rear panel)^[1]2 sources

Dimensions & facilities2

Cooling: Water-cooled^[1]
Dimensions: 27" x 19" x 6"^[1]

Configuration & options14

Model: CLX 10 K^[2]
Make: Comdel^[2]
Form Factor: 3U rackmount^[1]2 sources
DC Bus Input: 48 VDC nominal^[1]2 sources
Water Flow Requirement: 13 L/min minimum flow^[1]2 sources
Maximum Water Temperature: 25°C^[1]2 sources
Secondary Model: 27-257659-00^[1]
MPN: FP1605RA^[1]
Date of Manufacture: 2/10/05^[1]
Revision: A^[1]2 sources
Cooling Method: Water-cooled^[3]
Model Number (Secondary): 27-257659-00^[3]
Manufacturer Part Number (MPN): FP1605RA^[3]
Date of Manufacture: February 10, 2005^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

TypeLow Frequency RF Power Generator^[1]
Power Output10 kW^[1]
RF Output ConnectorBNC connector (rear panel)^[1]
Maximum Water Pressure552 kPa^[1]

Where are the manuals?

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Not publicly documented

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Frequently asked questions

What type of equipment is the Comdel CLX 10 K?

The Comdel CLX 10 K is a low frequency RF power generator.^[3]

What is the power output of the CLX 10 K?

The CLX 10 K has a power output of 10 kW.^[3]^[1]

What is the mounting form factor of the CLX 10 K?

The CLX 10 K is a 3U rackmount unit.^[3]^[1]

What cooling method does the CLX 10 K use?

The CLX 10 K is water-cooled.^[3]^[1]

What connector is used for RF output on the CLX 10 K?

The CLX 10 K uses a rear-panel BNC connector for RF output.^[3]^[1]

Not publicly documented

The following facts about the CLX 10 K are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CLX 10 K are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CLX 10 K are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CLX 10 K are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CLX 10 K are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CLX 10 K is not on record.
Answerable by: an OEM datasheet or a fab qualification report