Denton Vacuum
Explorer 14
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Explorer 14 is built on the DV-502A system platform. The standard configuration includes a 12” x 12” Pyrex bell jar chamber mounted on a 15” diameter stainless steel baseplate. A backlit, color, touch-screen panel provides the user interface. The base system has floor space dimensions of 30” wide by 28” deep by 60” high and weighs 700 lbs.[5]
How it works
Standard pumping is provided by a 250 lps diffusion pump with an integral liquid nitrogen trap, backed by a 7 ctm two-stage direct-drive mechanical pump. A 1 kva evaporation power supply is switchable between two feedthrough positions on the baseplate. The system includes a full range hot filament. Metal bellows-sealed valves are used throughout. The baseplate has ten total feedthroughs for process connections.[5]
Optional pump packages include a cryo pump, and the system can be configured with an electron-beam evaporation source and a CC-105 ion source. Sputtering packages are available for metallic or insulating films. The touch-screen control system supports manual and automated process sequences, including pumpdown, vent, deposition, and cryo regeneration.[4][5]
Where it fits in the process flow
General reference — not yet source-verifiedThe Explorer 14 is used for thin film deposition steps that require high-vacuum conditions. In semiconductor fabrication, it deposits metals, dielectrics, and other materials for interconnects, contacts, or insulation layers. In electron microscopy, it prepares samples by depositing conductive or protective coatings.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Turbo pump is non-functional
What do the numbers mean?
Power & electrical6
Vacuum & pumping6
Wafer handling3
- Substrate Fixture
- Flat plate substrate holder for 4 inch wafers; configured for upward evaporation[4]
Gas & chemistry1
Optics & imaging2
Control & software2
Dimensions & facilities3
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration2 RF Cathodes, RF Plasma Clean[1]
- ConfigurationTurbo Pump is non-functional[1]
- Voltage208 VAC[2]
- Phase3 Phase[2]
- Pumping SystemCTI Cryogenics Cryo Torr 8 cryogenic pump; Varian DS 402 dual-stage rotary vane pump[4]
- High Vacuum ValveElectro-pneumatic gate valve[4]
- Vacuum GaugesTwo Inficon BPG 400 combination Bayard-Alpert ionization gauge transmitters[4]
- E-Gun Power SupplyTelemark TT-6 (6 kW) electron beam gun power supply with X/Y sweep memory[4]
- Mass Flow ControllersTwo MKS 2179 mass flow controllers (0 – 100 SCCM)[4]
- Diffusion Pump250 lps diffusion pump[5]
- Mechanical Pump7 cfm, two-stage, direct-drive mechanical pump[5]
- Evaporation Power Supply1 kva evaporation power supply switchable between two places on baseplate[5]
- Electrical Requirements220V, 50/60 Hz, 20 amps[5]
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- dep-03_denton_operating_manual.pdfManualumd.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What are the standard chamber dimensions of the Explorer 14?
The standard chamber is a 12” x 12” Pyrex bell jar with a 15” diameter stainless steel baseplate.[5]
What pumping system does the Explorer 14 use by default?
The standard pumping system includes a 250 lps diffusion pump with an integral liquid nitrogen trap and a 7 ctm two-stage direct-drive mechanical pump. An optional cryo pump is available.[5][4]
What electrical requirements does the system have?
The system requires 220 V, 50/60 Hz, 20 amps electrical supply.[5]
What applications is the Explorer 14 designed for?
Primary applications include high vacuum carbon coating for TEM and X-ray analysis, gold or gold-palladium sputter coating, carbon support films, carbon platinum replicas, rotary shadowing, aperture cleaning, chromium sputtering for high resolution SEM, and resistance evaporation of metallic compounds.[5]
Not publicly documented
The following facts about the Explorer 14 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Explorer 14 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Explorer 14 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Explorer 14 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Explorer 14 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Explorer 14 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]nanocenter.umd.edu — nanocenter.umd.edunanocenter.umd.edu
- [5]web.archive.org — dentonvacuum.com (Jul 20, 2006)web.archive.org
Last updated Oct 7, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13622 is an RF match unit intended for PVD (Physical Vapor Deposition) described as a High Efficiency HE RF Match-Bias.
The Applied Materials 0020 12458 Part is an insulator, side match component for the Hdp-Cvd Ultima Plus system.