Edwards

EB1

Research Quality: 40% complete

What is it?

The EB1 is described as a magnetically focused electron beam source used in thin film deposition. The source is ultra-compact, supplied mounted on an integral dual water feedthrough, and uses a 1 cm3 copper hearth for high-rate, thick film depositions. It can accept multiple sources for multi-layer depositions, uses a water-cooled copper block hearth with a removable copper crucible, and is powered by the EB3 5 kV 600 mA constant voltage power supply.

What can it run?

Process applications and technology nodes documented for this tool.

thin film deposition
high rate, thick film depositions
multi-layer depositions
evaporating aluminum and copper

What do the numbers mean?

Power & electrical1

power supply: EB3 5 kV 600 mA constant voltage power supply^[1]

Vacuum & pumping1

feedthroughs: supplied complete with two high vacuum feedthroughs^[1]

Optics & imaging1

type: magnetically focused electron beam source^[1]

Configuration & options11

compactness: ultra-compact^[1]
mounting: supplied mounted on an integral dual water feedthrough^[1]
hearth volume: 1 cm3 copper hearth^[1]
deposition capability: high rate, thick film depositions^[1]
multi-source capability: multiple sources can be fitted for multi-layer depositions^[1]
standard hearth: water-cooled copper block with a conically shaped aperture to accept a removable copper crucible^[1]
crucible liners: refractory crucible liners can be fitted for evaporating aluminum and copper^[1]
power rating: variable up to 3.0 kVA^[1]
beam deflection: 180°^[1]
beam deflection magnet: permanent magnet manufactured from Trigonal G^[1]
magnet characteristics: selected for low outgassing characteristics and field stability at high temperatures^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

power supplyEB3 5 kV 600 mA constant voltage power supply^[1]
feedthroughssupplied complete with two high vacuum feedthroughs^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the EB1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EB1 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EB1 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EB1 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EB1 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EB1 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources

[1]web.archive.org — web.archive.orgweb.archive.org

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Last updated Sep 22, 2026.

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