Edwards
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The absence of oil in the pumping chamber prevents back-migration of hydrocarbons into the evacuated system, providing a clean vacuum environment (Source 2).[4]
The pump includes a gas system that introduces purge gas into the base pump; this purge can be used in an economiser mode on light or medium duty processes to reduce nitrogen consumption (Source 2).[4]
Operation of the iH 1000 can be controlled via a Pump Display Terminal, a process tool interface, an iM Communications Module, or an iH Single Equipment Monitor (Source 2).[4]
The iH 1000 operates at pressures between atmospheric and ultimate vacuum, making it suitable for processes that require clean vacuum without oil contamination (Source 2).[4]
The Edwards iH 1000 dry pump is used for harsh duty processes where particulate, condensable, or corrosive by-products are present (Source 2).[4]
The pump is also applied in load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch, metal etch, implant source, HPD CVD, RTP, SACVD, MOCVD, and ALD (Source 3).[3]
The iH1000 has been manufactured since the late 1990s.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| iH1000 | — | — | Base designation listed with vintage-specific part numbers. | trilliumus.com[1] |
| iH1000 Enhanced | — | — | Listed as a vintage variant. | trilliumus.com[1] |
| iH1000 HEAC | — | — | Listed as a vintage variant. | trilliumus.com[1] |
| iH1000 New Look | — | — | Listed as a vintage variant. | trilliumus.com[1] |
| iH1000 Mark V | — | — | Listed as a vintage variant. | trilliumus.com[1] |
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The inlet connection is ISO 100 and the outlet connection is KF 40 (Source 2).[4]
The following facts about the iH 1000 Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the iH 1000 Dry are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the iH 1000 Dry are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the iH 1000 Dry is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the iH 1000 Dry are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the iH 1000 Dry are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Last updated Sep 24, 2026.