Edwards
IXL 120
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
Where it fits in the process flow
Applications
The Edwards iXL120 is suitable for clean-duty applications in all stages of semiconductor processing, including load lock transfer, metrology, lithography, and etch processes.[3]
The pump is applicable in dielectric and metal etch, and in chemical vapor deposition processes such as HDP-CVD, SACVD, MOCVD, PECVD, LPCVD, and ALD.[3]
What do the numbers mean?
Vacuum & pumping5
Dimensions & facilities3
Configuration & options2
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| iXL120N | — | — | Includes nitrogen purge system (N2 purge). | manualslib.com[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the ultimate pressure of the Edwards iXL120?
The Edwards iXL120 can achieve an ultimate pressure of 0.01 mbar (8 mTorr).[3]
What is the pumping speed of the Edwards iXL120?
The Edwards iXL120 has a pumping speed of 65 CFM.[2]
What type of vacuum pump is the Edwards iXL120?
The Edwards iXL120 is a dry pump system, not a rotary vane vacuum pump.[3]
Not publicly documented
The following facts about the IXL 120 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IXL 120 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the IXL 120 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IXL 120 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IXL 120 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the IXL 120 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]provac.com — provac.comprovac.com
- [3]manualslib.com — manualslib.commanualslib.com
Last updated Sep 26, 2026.