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Hitachi

4700

Metrology & Inspection
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The Hitachi 4700 is a scanning electron microscope. The Hitachi S-4700 Field Emission Scanning Electron Microscope is used for detailed image analysis of devices and circuits fabricated in the NanoFab. The Hitachi S-4700 Field Emission Scanning Electron Microscope can magnify images up to 500kX.[1]

Hitachi logo
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Power

0.5-30 keV[1]

Optics

up to 500kX[1]

What it is

The Hitachi 4700 is a scanning electron microscope used in metrology and inspection work.[2]

The Hitachi 4700 is also used as a detailed image analysis tool for devices and circuits fabricated in a NanoFab.[1]

How it works

The Hitachi S-4700 FESEM includes energy dispersive x-ray analysis for elemental identification. The specimen stage tilts to 60 degrees and rotates continuously through 360 degrees, and the beam accelerating voltage is variable from 0.5-30 keV.[1]

Where it fits in the process flow

The Hitachi S-4700 FESEM is used for detailed image analysis of fabricated devices and circuits in the NanoFab. The instrument can accommodate a sample up to 100 mm in diameter.[1]

Applications

The Hitachi S-4700 FESEM is used to inspect devices and circuits fabricated in the NanoFab. The instrument can magnify images up to 500kX, resolve features down to 2nm under ideal conditions, and identify elemental materials with energy dispersive x-ray analysis.[1]

What do the numbers mean?

Power & electrical1

Accelerating voltage
0.5-30 keV[1]
Accurate?

Optics & imaging2

Maximum magnification
up to 500kX[1]
Accurate?
Resolution
down to 2nm[1]
Accurate?

Configuration & options6

Type
Scanning Electron Microscope (SEM)[2]
Accurate?
Model
4700[2]
Accurate?
Sample diameter
up to 100mm[1]
Accurate?
Stage tilt
up to 60 degrees[1]
Accurate?
Stage rotation
full 360 degrees continuous rotation[1]
Accurate?
Analysis tool
energy dispersive x-ray analysis tool[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Accelerating voltage0.5-30 keV[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of microscope is the Hitachi 4700?

The Hitachi 4700 is a scanning electron microscope.[2]

What is the Hitachi 4700 used for in semiconductor work?

The Hitachi 4700 is used for detailed image analysis of devices and circuits fabricated in the NanoFab.[1]

What analytical capability is included on the Hitachi S-4700 FESEM?

The Hitachi S-4700 FESEM includes an energy dispersive x-ray analysis tool for elemental identification.[1]

What sample size can the stage accommodate?

The specimen stage can accommodate a sample up to 100 mm in diameter.[1]

Not publicly documented

The following facts about the 4700 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4700 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 4700 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 4700 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 4700 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 4700 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
  2. [2]Equipment inventory listing
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Last updated Oct 8, 2026.

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