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Hitachi

9380 II CD-SEM

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

9380 II CD-SEM — Inventory photo
Fig. 019380 II CD-SEMInventory photo[1]

Power

Single Phase[2]

Vacuum

Leybold/ TMP 340 ML /3[2]

What it is

The Hitachi 9380 II CD-SEM is a critical dimension scanning electron microscope manufactured by Hitachi. The model is designated as the 9380 II.[1][2]

How it works

General reference — not yet source-verified

A CD-SEM operates by scanning a focused electron beam across the wafer in a raster pattern. Interaction of the beam with the wafer material generates secondary electrons and backscattered electrons, which are collected by detectors to form an image. The resulting image is analyzed automatically to measure feature dimensions.

What do the numbers mean?

Power & electrical2

Power Phase
Single Phase[2]
Accurate?
Power Supply Unit
PS Unit (569-6546)[2]
Accurate?

Vacuum & pumping1

Vacuum Pump
Leybold/ TMP 340 ML /3[2]
Accurate?

Control & software1

Software Version
26.23[2]
Accurate?

Configuration & options3

Port Configuration
12" E3 Port / 8" OCL2300 Port[2]
Accurate?
Number of FOUR Ports
3[2]
Accurate?
Chiller
Hitachi / W-5010 T[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power PhaseSingle Phase[2]
  • Vacuum PumpLeybold/ TMP 340 ML /3[2]
  • Power Supply UnitPS Unit (569-6546)[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What power supply configuration does the Hitachi 9380 II require?

The tool requires a single phase power supply.[2]

What wafer ports or configurations are available?

The configuration includes a 12" E3 port and an 8" OCL2300 port, with a total of four ports.[2]

Not publicly documented

The following facts about the 9380 II CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9380 II CD-SEM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 9380 II CD-SEM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 9380 II CD-SEM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 9380 II CD-SEM are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 9380 II CD-SEM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Sep 30, 2026.

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