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Hitachi

IM4000C

Nano and Micro FabricationHitachi IM4000C family
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The Hitachi IM4000C is an argon ion milling system that combines cross-section milling and flat milling in one instrument. The Hitachi IM4000C is used primarily for high-quality sample preparation for SEM, EBSD, and other surface/cross-sectional characterization. The Hitachi IM4000C features argon ion energy up to 6 kV and sample size up to 25 mm x 50 mm.[1]

Hitachi logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Hitachi IM4000C is a broad beam ion milling system used in nano and micro fabrication. The Hitachi IM4000C is located in EER 6.636 at the University of Texas at Austin.[1]

How it works

The Hitachi IM4000C uses argon ion energy up to 6 kV. The Hitachi IM4000C supports stage movement up to 7 mm, stage rotation during milling, and stage tilting.[1]

The Hitachi IM4000C supports cross-sectioning using a mask. The Hitachi IM4000C accepts samples up to 25 mm by 50 mm.[1]

Where it fits in the process flow

The Hitachi IM4000C is used primarily for high-quality sample preparation for SEM, EBSD, and other surface and cross-sectional characterization. The Hitachi IM4000C can prepare cross-sectional surfaces for air-free transfer through a Rox interface to XPS or TOFSIMS.[1]

Applications

The Hitachi IM4000C is used for sample preparation for SEM and EBSD. The Hitachi IM4000C is also used for other surface and cross-sectional characterization.[1]

What do the numbers mean?

Wafer handling1

Glovebox connection
connected to an argon glovebox; air-free sample transfer via Rox interface to XPS or TOF-SIMS[1]
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Optics & imaging1

Stage capabilities
rotation and tilting during milling; cross-sectioning using a mask[1]
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Configuration & options13

Model
IM4000C[1]
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OEM
Hitachi[1]
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Equipment name
Hitachi IM4000C Broad Beam Ion Milling System[1]
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Equipment type
Nano and Micro Fabrication[1]
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Contact
Dr. Hugo Celio[1]
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Location
EER 6.636[1]
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Ion source
Argon ion[1]
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Argon ion energy
up to 6 kV[1]
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Sample size
up to 25 mm x 50 mm[1]
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Stage movement (Z)
up to 7 mm[1]
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Maximum milling rate (spot milling Si)
20 µm/hour[1]
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Maximum milling rate (flat milling Si, 5 mm diameter area)
2 µm/hour[1]
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Maximum milling rate (cross sections Si)
300 µm/hour[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What sample preparation tasks does the Hitachi IM4000C support?

The Hitachi IM4000C is used primarily for high-quality sample preparation for SEM, EBSD, and other surface and cross-sectional characterization.[1]

What milling modes does the Hitachi IM4000C provide?

The Hitachi IM4000C combines cross-section milling and flat milling in one instrument.[1]

Not publicly documented

The following facts about the IM4000C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IM4000C are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IM4000C are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IM4000C are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IM4000C are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IM4000C is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edu — tmi.utexas.edutmi.utexas.edu
  2. [2]Instrumentation — tmi.utexas.edutmi.utexas.edu
  3. [3]Instrumentation — tmi.utexas.edutmi.utexas.edu
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Last updated Oct 3, 2026.