Hitachi

Kokusai DJ 825 V 8 BL

Thermal / Diffusion Hitachi Kokusai family

Research Quality: 20% complete

The Hitachi Kokusai DJ 825 V 8 BL is a thermal / diffusion furnace. The Hitachi Kokusai DJ 825 V 8 BL is an 8-inch furnace. The Hitachi Kokusai DJ 825 V 8 BL has a low pressure vertical loadlock chamber.^[1]^[2]

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Power

DJ 825 V 8 BL^[2]

Vacuum

Low Pressure Vertical Loadlock Chamber^[2]

What is it?

The Hitachi Kokusai DJ 825 V 8 BL is a 8-inch furnace with a low pressure vertical loadlock chamber, described as a batch furnace for 100 wafers and doped poly silicon.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Not working

What do the numbers mean?

Power & electrical1

Model: DJ 825 V 8 BL^[2]

Vacuum & pumping2

Low Pressure Vertical Loadlock Chamber^[2]
Vacuum / pumping: Low Pressure Vertical Loadlock Chamber^[1]

Wafer handling1

Wafer size: 8 inch^[2]

Configuration & options9

Furnace Frame^[1]; Batch of 100wfr (oven size)^[2]; Doped Poly SI^[2]; not working^[2]
Manufacturer: Hitachi Kokusai^[2]
Category: Thermal / Diffusion^[1]
Batch size: Batch of 100wfr (oven size)^[1]
Process material: Doped Poly SI^[1]
Working status: not working^[1]

Vintage & configurations

1996Vintage^[2]
1996 Vintage

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationLow Pressure Vertical Loadlock Chamber^[2]
ModelDJ 825 V 8 BL^[2]
Vacuum / pumpingLow Pressure Vertical Loadlock Chamber^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the DJ 825 V 8 BL support?

The DJ 825 V 8 BL supports 8 inch wafers.^[2]^[1]

Not publicly documented

The following facts about the Kokusai DJ 825 V 8 BL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the Kokusai DJ 825 V 8 BL are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kokusai DJ 825 V 8 BL are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Kokusai DJ 825 V 8 BL is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Kokusai DJ 825 V 8 BL are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Kokusai DJ 825 V 8 BL are on record.
Answerable by: university cleanroom staff or an OEM application specialist