Hitachi
Kokusai DJ 853 V J 3 Diffusion
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Hitachi Kokusai DJ 853 V J 3 is a thermal/diffusion furnace. The Hitachi Kokusai DJ 853 V J 3 processes 8-inch wafers and is configured for nitride. The Hitachi Kokusai DJ 853 V J 3 belongs to the Hitachi Kokusai DJ 853 family.[1][2]
What it is
The Hitachi Kokusai DJ 853 V J 3 Diffusion is a thermal diffusion furnace.[1][2]
The DJ 853 V J 3 belongs to the Hitachi Kokusai DJ 853 family.[2]
How it works
General reference — not yet source-verifiedA diffusion furnace applies controlled heat to process semiconductor wafers in a furnace environment.
Thermal diffusion tools are used to drive dopants into silicon and to perform related high-temperature wafer processing steps.
Where it fits in the process flow
General reference — not yet source-verifiedA diffusion furnace sits in the wafer thermal-processing portion of the fab flow.
The tool is typically used after front-end wafer preparation steps and before later device completion steps that follow high-temperature processing.
Applications
General reference — not yet source-verifiedDiffusion furnaces are used for semiconductor wafer thermal processing.
What do the numbers mean?
Wafer handling1
Configuration & options5
- Nitride[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Kokusai DJ 853 V J 3 Diffusion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kokusai DJ 853 V J 3 Diffusion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Kokusai DJ 853 V J 3 Diffusion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kokusai DJ 853 V J 3 Diffusion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Kokusai DJ 853 V J 3 Diffusion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Kokusai DJ 853 V J 3 Diffusion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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