Hitachi
S 806
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Hitachi S 806 is a scanning electron microscope (SEM) used for metrology and inspection in semiconductor and materials analysis.[1][2]
How it works
The S 806 includes an EDX (energy-dispersive X-ray spectroscopy) system for elemental analysis, with a Thermo/Noran Six detector.[3]
Where it fits in the process flow
General reference — not yet source-verifiedSEMs are used in semiconductor fabrication for defect review, critical dimension measurement, and contamination analysis after various process steps such as etching, deposition, or lithography.
Applications
General reference — not yet source-verifiedThe Hitachi S 806 SEM is applied in semiconductor manufacturing for imaging and elemental analysis of wafer surfaces and structures.
What do the numbers mean?
Wafer handling1
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the S 806 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 806 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 806 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 806 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 806 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 806 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Hitachi REM S806 — shop.labexchange.comshop.labexchange.com
Last updated Oct 7, 2026.
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