Waferpedia

JDSU

2213 75 TSLKTB

JDSU 2213 family
Research Quality: 30% complete

The JDSU 2213 75 TSLKTB is a 75 mW laser diode module used as a replacement light source in KLA wafer inspection systems. The JDSU 2213 75 TSLKTB laser is available with part number 0106301-001 for AIT-series tools and part number 0278424-000 for the SP1 DLS tool. The SP1 DLS variant of the JDSU 2213 75 TSLKTB includes mounting rings.[1]

JDSU2213 75 TSLKTB
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What it is

The JDSU 2213 75 TSLKTB is a laser unit.[2]

What do the numbers mean?

Optics & imaging1

Equipment type
Laser[2]
Accurate?

Configuration & options26

Compatible with AIT 3 AIT XP Part Number
0106301 001[2]
Accurate?
75 mW[2]
Accurate?
Compatible with KLA AIT 2 Part Number
0106301 001[3]
Accurate?
Compatible with KLA SP 1 DLS Part Number
0278424-000[1]
Accurate?
With rings[1]
Accurate?
Power
75 mW[2]
Accurate?
Part number
0106301-001[2]
Accurate?
Part number
0278424-000[1]
Accurate?
Compatible with
KLA AIT 3, AIT XP[2]
Accurate?
Compatible with
KLA AIT 2[3]
Accurate?
Compatible with
KLA SP 1 DLS[1]
Accurate?
Manufacturer
JDSU[3]
Accurate?
Model
2213 75 TSLKTB[3]
Accurate?
Output Power
75 mW[3]
Accurate?
Compatibility
KLA AIT 2[3]
Accurate?
Part Number (KLA AIT 2)
0106301 001[3]
Accurate?
Compatibility
KLA SP 1 DLS[1]
Accurate?
Part Number (KLA SP 1 DLS)
0278424-000[1]
Accurate?
Accessories
With rings[1]
Accurate?
Part Number (AIT 3/AIT XP)
0106301 001[2]
Accurate?
Part Number (AIT 2)
0106301 001[3]
Accurate?
Part Number (SP1 DLS)
0278424-000[1]
Accurate?
Make
JDSU[2]
Accurate?
Part number (AIT 3 / AIT XP and KLA AIT 2)
0106301 001[2]
Accurate?
With rings (KLA SP 1 DLS version)[1]
Accurate?
Compatibility
AIT 3 / AIT XP[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the power output of the JDSU 2213 75 TSLKTB laser?

The JDSU 2213 75 TSLKTB laser has a power output of 75 mW.[2][3][1]

With which inspection systems is the JDSU 2213 75 TSLKTB laser compatible?

The JDSU 2213 75 TSLKTB laser is compatible with KLA AIT 2, KLA SP 1 DLS, and AIT 3 AIT XP systems.[2][3][1]

What is the manufacturer of the JDSU 2213 75 TSLKTB laser?

The manufacturer of the JDSU 2213 75 TSLKTB laser is JDSU.[2][3][1]

Not publicly documented

The following facts about the 2213 75 TSLKTB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2213 75 TSLKTB are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 2213 75 TSLKTB are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 2213 75 TSLKTB are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2213 75 TSLKTB are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2213 75 TSLKTB is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
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Last updated Oct 3, 2026.

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