Kensington
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Wafer handling robots use programmable robotic arms equipped with vacuum or mechanical end-effectors to pick wafers from cassettes or chucks. A prealigner within the robot, or as an integrated module, uses optical sensors to detect wafer notch or flat and rotates the wafer to a consistent orientation before placement. The robot then transfers the aligned wafer to the next process station, such as a mask aligner or coater.
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The following facts about the WFH 4 C Wafer Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WFH 4 C Wafer Robot are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the WFH 4 C Wafer Robot are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WFH 4 C Wafer Robot are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WFH 4 C Wafer Robot are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WFH 4 C Wafer Robot is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 10, 2026.
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.