Keysight

5517 A

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Keysight5517 A

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Power

316 MHz^[3]

Vacuum

2 ppb (1 hour); 20 ppb (lifetime)^[3]

Performance

Precision dual-frequency interferometry^[3]

Optics

Class II helium-neon laser^[3]

What it is

General reference — not yet source-verified

Laser heads such as the 5517A are key components in interferometric position measurement systems used in semiconductor manufacturing equipment.

What do the numbers mean?

Power & electrical3

Reference frequency: 316 MHz^[3]
Required power supply voltage: 15 V^[3]
Compatible power supply model: Keysight 10884B supply or equivalent^[3]

Vacuum & pumping1

Vacuum wavelength stability: 2 ppb (1 hour); 20 ppb (lifetime)^[3]

Optics & imaging4

Laser type: Class II helium-neon laser^[3]
Wavelength: 633 nm^[3]
Laser beam output diameter: 6 mm^[3]
Wavelength accuracy: ± 0.1 ppm standard; ± 0.02 ppm with optional calibration^[3]

Performance1

Application: Precision dual-frequency interferometry^[3]

Configuration & options6

Compatible with ASML PAS 2500 / 5000 Part Number: 4022 502 25005^[1]
Compatible with Canon Part Number: BG 9 1304^[2]
Max linear velocity: 411 mm/s^[3]
Min output power: 1.5 to 2.0 µW^[3]
Warm-up time: < 10 minutes^[3]
Mean time between failures (MTBF): > 50,000 hours typical^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Reference frequency316 MHz^[3]
Vacuum wavelength stability2 ppb (1 hour); 20 ppb (lifetime)^[3]
Required power supply voltage15 V^[3]
Compatible power supply modelKeysight 10884B supply or equivalent^[3]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 5517 A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5517 A are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 5517 A are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5517 A are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5517 A are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5517 A is not on record.
Answerable by: an OEM datasheet or a fab qualification report