KLA
8100 Electronic Source
The KLA 8100 Electronic Source is a KLA-manufactured equipment item. The KLA 8100 Electronic Source is categorized as Thermal / Diffusion. The KLA 8100 Electronic Source has a 3000 V extraction voltage.[1][2][3]
How it works
The KLA 8100 Electronic Source operates by thermionic emission. A filament is heated to an operating temperature of 1800 Kelvin by a filament current of 2330 mA. Electrons are emitted from the filament and are extracted and accelerated by an extraction voltage of 3000 V, producing an extraction current of 105 µA.[3][1]
The emitter has a radius of 0.36 µm. The tip of the emitter protrudes 250 µm from the suppressor electrode. The electron source operates under high vacuum: the emitter chamber base pressure is less than 2×10⁻⁹ mbar, and the maximum operating pressure is less than 5×10⁻⁹ mbar. The base pressure after a bake cycle is 3.20×10⁻¹⁰ Torr.[3][1]
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Why is atmosphere control important in this class of equipment?General reference — not yet source-verified
Atmosphere control helps maintain consistent process behavior and supports the intended thermal reaction or material transformation during wafer processing.
Not publicly documented
The following facts about the 8100 Electronic Source are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8100 Electronic Source are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 8100 Electronic Source are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 8100 Electronic Source are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 8100 Electronic Source are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 8100 Electronic Source is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]KLA 8100 family | Waferpedia — waferpedia.comwaferpedia.com
- [3]inventory listing
- [4]Inventory photo
Last updated Oct 12, 2026.
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