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KLA

Archer XT+ Overlay Measurement

Metrology & InspectionKLA Archer family
Research Quality: 40% complete
KLAArcher XT+ Overlay Measurement
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Power

New System power supplies[1]

Optics

Refurbished AMS camera assembly[1]

What it is

The KLA Archer XT+ Overlay Measurement is a metrology and inspection system used for overlay measurement in semiconductor manufacturing.[1][4]

The Archer XT+ belongs to the KLA Archer family.[4]

How it works

General reference — not yet source-verified

Overlay measurement tools compare patterned layers so a fab can evaluate alignment between successive process steps.

Where it fits in the process flow

General reference — not yet source-verified

The Archer XT+ is used after patterning steps that create the layers whose relative position must be checked.

Applications

The Archer XT+ is used for overlay measurement in semiconductor process control.[1][4]

What do the numbers mean?

Power & electrical1

New System power supplies[1]
Accurate?

Vacuum & pumping1

New Pneumatic panel valves & Air / Vac / Exhaust lines fitted[1]
Accurate?

Wafer handling6

Robot Handler Options:[1]
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The system can be configured with all handler types[1]
Accurate?
Dual port 200mm open handler[1]
Accurate?
Dual port 200mm SMIF handler[1]
Accurate?
Dual port 300mm Phoenix Yaskawa handler[1]
Accurate?
Wafer size
200 mm / 300 mm[2]
Accurate?

Optics & imaging1

Refurbished AMS camera assembly[1]
Accurate?

Control & software2

Software version
5.60[1]
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Refurbished system PC with new hard-drives[1]
Accurate?

Configuration & options8

New / Refurbished Items:[1]
Accurate?
New system consumable parts
Shutter, HLS Lamp & Air Filters[1]
Accurate?
Refurbished HLS (Halogen Light Source) assembly[1]
Accurate?
Refurbished X/Y/T stage[1]
Accurate?
Refurbished IDE flotation table[1]
Accurate?
Tripel port 300mm Phoenix Kawasaki[1]
Accurate?
Installation and Warranty Available[1]
Accurate?
Family
KLA Archer[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationNew System power supplies[1]
  • ConfigurationNew Pneumatic panel valves & Air / Vac / Exhaust lines fitted[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of equipment is the KLA Archer XT+?

The KLA Archer XT+ is a metrology and inspection system for overlay measurement.[1][4]

What family does the Archer XT+ belong to?

The Archer XT+ belongs to the KLA Archer family.[4]

Not publicly documented

The following facts about the Archer XT+ Overlay Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Archer XT+ Overlay Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Archer XT+ Overlay Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Archer XT+ Overlay Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Archer XT+ Overlay Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Archer XT+ Overlay Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]KLA Archer XT+ Overlay Measurement vs KLA P-17 | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Sep 23, 2026.

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