KLA
Candela 8720 Surface Defect
What it is
How it works
The Candela 8720 uses optical inspection channels to measure scatter intensity, topographic variation, surface reflectivity, phase shift, and photoluminescence. The system combines multiple optical inspection techniques in a single scan for defect detection and classification.[4][5][6]
The Candela 8720 can operate in high-throughput, standard resolution, and high resolution modes. The system also uses multiple detection channels so that defect signatures from different views can support macro and micro defect classification.[4][6]
Where it fits in the process flow
The Candela 8720 sits in front end inspection and process control for wafer quality assessment. The system is used to monitor substrates, epitaxy, and process excursions before defects propagate into later manufacturing steps.[4][6][5]
The Candela 8720 supports process monitoring, qualification, root-cause analysis, wafer sorting, and defect review. The system also produces wafer maps, defect logs, and inspection summaries for production review.[4]
Applications
The Candela 8720 is applied to substrate quality control, incoming wafer quality control, epitaxy process control, substrate-to-epitaxy correlation, and process tool monitoring. The system is also used for defects such as micro-pits, cracks, hexagonal bumps, showerhead droplets, crescents, scratches, hillocks, slips lines, and particle-type defects.[4][7][6]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Aligner is broken
What do the numbers mean?
Power & electrical1
- Custom Specifications
- Transformer for stepping up the power supply voltage from 200 V to 230 V[1]
Wafer handling5
Optics & imaging7
Control & software4
- Computer Unit[1]
Configuration & options11
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Custom SpecificationsTransformer for stepping up the power supply voltage from 200 V to 230 V[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What defect types can the Candela 8720 detect?
The Candela 8720 can detect and classify macro and micro defects, including cracks, micro-pits, hexagonal bumps, crescents, scratches, showerhead droplets, hillocks, sliplines, and other topographic defects.[4][6][7]
What types of outputs does the Candela 8720 produce?
The Candela 8720 produces defect maps, pareto charts, inspection summaries, defect logs, wafer maps, and contour maps.[4]
Not publicly documented
The following facts about the Candela 8720 Surface Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela 8720 Surface Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Candela 8720 Surface Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Candela 8720 Surface Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Candela 8720 Surface Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Candela 8720 Surface Defect are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]https://www.kla.com/wp-content/uploads/Candela_8720_Brochure.pdf — kla.comkla.com
- [5]Candela 8720 Surface Defect Inspection System | RAE — raepitaxy.comraepitaxy.com
- [6]Candela® 8720 – Metrosemi — metrosemi.commetrosemi.com
- [7]Candela® 8720表面缺陷检测系统 - FIRSTNANO — firstnanosystem.comfirstnanosystem.com
Last updated Oct 10, 2026.
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