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KLA

PN: 780-13182-000 Part

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The KLA PN: 780-13182-000 is a spare part capable of working on the KLA 8100 CD-SEM.[1][2]

KLAPN: 780-13182-000 Part
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What it is

General reference — not yet source-verified

As a component of a CD-SEM, this part is typically one of the electronic or mechanical assemblies that enable the tool to measure critical dimensions on patterned wafers.

How it works

General reference — not yet source-verified

A CD-SEM operates by scanning a focused electron beam across the wafer surface and detecting secondary electrons. The detected signal is used to generate high-resolution images for measuring line widths and other features. The part identified by this number serves a specific function within that process, such as signal processing or beam control.

Where it fits in the process flow

General reference — not yet source-verified

In a semiconductor fab, CD-SEMs are used in-line for process control after lithography and etch steps. Replacement parts for these tools are used during preventive maintenance or repair to ensure the metrology tool remains calibrated and operational.

Applications

General reference — not yet source-verified

The part is used to support the operation of the associated CD-SEM tool in semiconductor metrology applications, particularly for measuring critical dimensions that are essential for process control.

What do the numbers mean?

Configuration & options3

Capable of working on KLA 8100 CD-SEM[1]
Accurate?
Refurbished[2]
Accurate?
Compatibility
KLA 8100 CD-SEM[1]
Accurate?
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Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • KLA PN: 780-13182-000 Part780-13182-000In Productionsource[1]
  • KLA PN: 780-13182-000 Part780-13182-000In Productionsource[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the model designation of this part?

The part is designated as PN: 780-13182-000.[1][2]

Which tool is this part capable of working on?

The part is capable of working on the KLA 8100 CD-SEM.[1][2]

Not publicly documented

The following facts about the PN: 780-13182-000 Part are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PN: 780-13182-000 Part are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the PN: 780-13182-000 Part are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the PN: 780-13182-000 Part are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the PN: 780-13182-000 Part are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the PN: 780-13182-000 Part is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
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Last updated Oct 9, 2026.

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