Waferpedia

KLA

Prometrix UV 1250 SE Film Thickness Measurement

Metrology & InspectionKLA UV 1250 SE family
Research Quality: 50% complete
Prometrix UV 1250 SE Film Thickness Measurement — Inventory photo
Fig. 01Prometrix UV 1250 SE Film Thickness MeasurementInventory photo[1]

What it is

The KLA Prometrix UV 1250 SE Film Thickness Measurement is a metrology and inspection system for film thickness measurement.[2]

The KLA Prometrix UV 1250 SE Film Thickness Measurement is configured for 8-inch wafers.[2][1]

How it works

General reference — not yet source-verified

A film thickness measurement system evaluates deposited layers on a wafer by measuring a film-related optical or physical response and converting that response into thickness data.

Metrology equipment of this class is used to support process control by checking layer uniformity and verifying whether a coating or film step has produced the expected result.

Where it fits in the process flow

The KLA Prometrix UV 1250 SE Film Thickness Measurement belongs in the metrology and inspection portion of semiconductor manufacturing.[2]

Applications

The KLA Prometrix UV 1250 SE Film Thickness Measurement is used for wafer film thickness measurement on 8-inch wafers.[2][1]

What do the numbers mean?

Power & electrical6

120 Volt[1]
Accurate?
1.8k Watts[1]
Accurate?
50/60 Hz[1]
Accurate?
Voltage
120 Volt[1]
Accurate?
Power
1.8k Watts[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?

Wafer handling2

Robot Type
KLA H2D[1]
Accurate?
Wafer size
8 inch[1]
Accurate?

Control & software1

Software Version
2.4[1]
Accurate?

Configuration & options3

Phase
1 Phase[1]
Accurate?
Manufacturer
KLA[1]
Accurate?
Model
Prometrix UV 1250 SE[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration120 Volt[1]
  • Configuration1.8k Watts[1]
  • Configuration50/60 Hz[1]
  • Voltage120 Volt[1]
  • Power1.8k Watts[1]
  • Frequency50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What wafer sizes does the KLA Prometrix UV 1250 SE support?

The system supports 8-inch wafers.[1][2]

What are the electrical supply requirements?

The system requires a single-phase 120 V, 1.8 kW, 50/60 Hz electrical supply.[1][2]

What type of robot handles wafers?

The system uses a KLA H2D robot for wafer handling.[1][2]

What software version does the system run?

The system runs software version 2.4.[1][2]

Not publicly documented

The following facts about the Prometrix UV 1250 SE Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Prometrix UV 1250 SE Film Thickness Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Prometrix UV 1250 SE Film Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Prometrix UV 1250 SE Film Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Prometrix UV 1250 SE Film Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Prometrix UV 1250 SE Film Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Prometrix UV 1250 SE Film Thickness Measurement — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Was this page accurate?

Last updated Oct 11, 2026.

Compare with similar tools

View all →