KLA
Surfscan 6100 Wafer
What it is
The KLA Surfscan 6100 is a wafer inspection system used for metrology and inspection. The equipment identified here is a KLA model Surfscan 6100 Wafer Inspection System.[1][2]
How it works
Listed upgrades and replacements include a new single board computer at 800 MHz, USB 2.0 ports, solid-state hard drives, a color LCD monitor, a user interface keypad, and a PS/2 keyboard and optical mouse. One description also mentions upgraded circuit boards including motor distribution, 4 channel motor, INSW, GPIO, below wafer, CPU 800 MHz with USB 2.0, solid state hard drives, distribution backplane, analog, and key pad/laser mouse.[1][2]
Other described mechanical and serviceable elements include an advanced lead screw upgrade, new motors, rebuilt new style indexers, a refurbished load arm and lead screw, calibration of cassette elevators, and cleaning or replacement of optics and mirrors as needed.[1][2]
Applications
What do the numbers mean?
Power & electrical5
- CPU 800Mhz with USB 2.0[1]
Wafer handling2
- Rebuilt New style indexers.[1]
Optics & imaging8
Control & software1
Configuration & options17
- 17A[1]
- Advanced Lead screw Upgrade.[1]
- New Motors.[1]
- Upgraded circuit boards (2025):[1]
- Motor Distribution[1]
- 4 Channel Motor[1]
- INSW[1]
- GPIO[1]
- Solid State Hard Drives[1]
- Distribution Backplane[1]
- Analog[1]
- Refurbished[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the typical throughput for such inspection systems?General reference — not yet source-verified
Throughput depends on the scan area, desired sensitivity, and defect review requirements. Class-level tools are designed to balance speed and sensitivity, often capable of inspecting a full wafer in a few minutes for standard recipes, with adjustable settings to trade off throughput for lower detection limits.
What wafer types and surfaces can be inspected?General reference — not yet source-verified
The class typically supports both bare silicon wafers (polished, epitaxial, or SOI) and wafers with very thin films or low pattern density. Some systems can also handle wafers with mild topography or deposited layers. The inspection is non-contact and can be applied to whole wafers or selected regions.
How is defect sensitivity defined and maintained?General reference — not yet source-verified
Sensitivity is characterized by the minimum detectable particle size, which is influenced by laser power, wavelength, collection optics, and detector noise. Regular calibration using reference particles of known size ensures consistent sensitivity. Environmental controls (vibration isolation, cleanroom conditions) and tool self-diagnostics also maintain performance.
Not publicly documented
The following facts about the Surfscan 6100 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6100 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6100 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6100 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6100 Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6100 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Oct 11, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
