KLA

Surfscan 6220

Metrology & Inspection KLA Surfscan 6220 family

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The KLA Surfscan 6220 is an unpatterned wafer surface analyzer for particle and defect detection. The Surfscan 6220 uses a 30 mW Argon-Ion laser at 488 nm illumination and achieves a defect sensitivity of 0.09 µm PSL sphere equivalent at greater than 80% capture rate (0.112 µm at 90%). The Surfscan 6220 handles wafer sizes from 2" to 8" (100 mm to 200 mm) and has a throughput of 100 wph at 0.12 µm on 200 mm wafers.^[1]^[2]

Surfscan 6220 — Inventory photo — Fig. 01Surfscan 6220Inventory photo^[3]

Power

Single Phase^[3]

Performance

100 wph (200 mm) at 0.12 µm^[1]

Optics

30 mW Argon-Ion laser, 488 nm wavelength^[1]

What it is

The KLA Surfscan 6220 is a wafer particle detection system.^[4]

The KLA Surfscan 6220 is a surface inspection tool for unpatterned wafers and bare wafer surface defect inspection.^[1]^[2]

How it works

The Surfscan 6220 inspects bare, polished wafer surfaces by detecting scattered light from surface defects and particles.^[1]^[2]

The Surfscan 6220 uses a 30 mW argon-ion laser at 488 nm wavelength for illumination.^[1]^[2]

Where it fits in the process flow

The Surfscan 6220 is used on bare silicon and other polished substrates for particle inspection and defect checking in the front-end wafer flow.^[1]^[2]

Applications

The Surfscan 6220 is used for particle detection, surface defect inspection, and contamination monitoring on unpatterned wafers and other opaque polished surfaces with low light scatter.^[1]

What do the numbers mean?

Power & electrical4

Single Phase^[3]
Frequency: 60 Hz^[3]
Voltage: 208 V^[3]
Electrical requirements: Single phase, 60 Hz, 17 A, 208 V^[3]

Wafer handling12

Equipment type: Bare wafer surface defect inspection system / Particle inspection system^[1]
Substrate sizes (inch): 2", 3", 4", 6", 8"^[1]
Substrate sizes (metric): 100 mm, 125 mm, 150 mm, 200 mm (round or rectangular)^[2]
Wafer thickness: SEMI Standard Wafer Thickness^[1]
Wafer handling: Single puck wafer handling from two cassettes (one sender/receiver, one receiver); non-contaminating robotic handler^[1]
Wafer handling (alternate): Non-contaminating robotic handler; random access sender/receiver unit^[2]
Product type: Wafer Particle Detection System^[4]
Product type: Bare Wafer Surface Defect Inspection System^[1]
Wafer sizes: 2", 3", 4", 6", and 8" wafers^[1]
Substrate sizes: 100, 125, 150, and 200 mm (round or rectangular substrates)^[2]
Substrate sizes: 2 In., 3 In., 82, 100, 125, 150, 200 mm^[5]
Cassette handling: Single puck wafer handling from two cassettes (one sender/receiver, one receiver)^[1]

Optics & imaging2

Illumination source: 30 mW Argon-Ion laser, 488 nm wavelength^[1]2 sources
Spatial resolution: 50 µm^[2]

Performance7

Count repeatability: Error less than 0.5% at 1 standard deviation (mean count >500, 0.364 mm dia. latex spheres)^[1]
Count repeatability (alternate): Less than 1.0% at 1 standard deviation (mean count >500, 0.204 µm diameter latex spheres on bare silicon)^[2]
Count accuracy: Better than 99% (verified with VLSI Standards’ Relative Standard)^[1]
Throughput: 100 wph (200 mm) at 0.12 µm^[1]
Repeatability: Count repeatability error less than 0.5 percent at 1 standard deviation^[1]
Accuracy: Count accuracy better than 99 percent^[1]
Throughput: 100 wph (200 mm) at 0.12 mm^[1]

Control & software1

Operator interface: Mouse and/or dedicated user keypad^[1]

Configuration & options17

17 A^[3]
Material compatibility: Any opaque, polished surface which scatters less than 5 percent of incident light^[1]
Defect sensitivity (most surfaces): Better than 0.20 µm @ 95% capture rate^[2]
Defect sensitivity (polished surfaces): Better than 0.10 µm @ 95% capture rate^[2]
Defect sensitivity (bare silicon): 0.12 µm^[2]
Defect sensitivity (PSL sphere equivalent): 0.09 µm diameter @ >80% capture rate (0.112 µm @ 90%)^[1]
Contamination: Less than 0.005 particles/cm² >0.15 µm diameter per single pass^[1]
Contamination (alternate): Less than 0.005 particles/cm >0.15 µm^[2]
Haze sensitivity: 0.02 ppm^[2]
Signal integration: 2D signal integration^[2]
OEM: KLA^[3]
Model: Surfscan 6220^[3]
Product type: Unpatterned Surface Inspection System^[5]
Sensitivity: 0.09 micrometer diameter PSL sphere equivalent with greater than 80 percent capture rate^[1]
Contamination: Less than 0.005 particles/cm2 greater than 0.15 mm dia. per single pass^[1]
Vintage: 1996^[3]
Vintage: 01.07.1997^[4]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationSingle Phase^[3]
Frequency60 Hz^[3]
Voltage208 V^[3]
Electrical requirementsSingle phase, 60 Hz, 17 A, 208 V^[3]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

KLA Surfscan 6220 SBC UpgradeIn Productionsource^[6]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of system is the Surfscan 6220?

The Surfscan 6220 is a wafer particle detection system and a surface inspection tool for unpatterned wafers.^[4]^[1]

What light source is used on the Surfscan 6220?

The Surfscan 6220 uses a 30 mW argon-ion laser at 488 nm wavelength.^[1]^[2]

What type of surfaces can the Surfscan 6220 inspect?

The Surfscan 6220 inspects bare silicon, polished surfaces, and other opaque polished surfaces that scatter less than five percent of incident light.^[1]

Not publicly documented

The following facts about the Surfscan 6220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6220 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6220 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6220 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6220 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6220 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (7)Every fact above is drawn from these public sources

[1]classoneequipment.com — classoneequipment.comclassoneequipment.com
[2]semistarcorp.com — semistarcorp.comsemistarcorp.com
[3]Inventory photo
[4]fabsurplus.com — fabsurplus.comfabsurplus.com
[5]yorkscientific.com — yorkscientific.comyorkscientific.com
[6]Equipment inventory listing
[7]KLA Tencor | Certified Used Equipment | Opti-Probe® 3291 (DUV) — kla-tencor.com (Jan 24, 2010)web.archive.org