KLA
Surfscan 6400 Film Surface Analysis
The KLA Surfscan 6400 Film Surface Analysis is a metrology and inspection tool. The KLA Surfscan 6400 Film Surface Analysis is used for film surface analysis on 200mm wafers.[1][2]
What it is
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the voltage requirement of the Surfscan 6400?
What is the current rating of the Surfscan 6400?
What phase configuration does the Surfscan 6400 require?
The Surfscan 6400 requires a single-phase electrical configuration.[3][4][1]
What is the frequency requirement of the Surfscan 6400?
What is the equipment category of the Surfscan 6400?
The Surfscan 6400 is categorized as metrology and inspection equipment.[1]
Not publicly documented
The following facts about the Surfscan 6400 Film Surface Analysis are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6400 Film Surface Analysis are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6400 Film Surface Analysis are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6400 Film Surface Analysis are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6400 Film Surface Analysis are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6400 Film Surface Analysis is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Surfscan 6400 Film Surface Analysis — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [2]fabsurplus.com — fabsurplus.comfabsurplus.com
- [3]Inventory photo
- [4]Inventory photo
Last updated Oct 8, 2026.
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