KLA
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The KLA-Tencor Surfscan 6420 is an unpatterned surface inspection system that detects, counts, and sizes particle defects on wafers. The Surfscan 6420 uses a 30 mW Argon-Ion laser at 488 nm and achieves a defect sensitivity better than 0.12 µm on polished silicon at a 95% capture rate.[1][2]
The KLA Surfscan 6420 uses a laser-based scanning system with a 30 mW argon-ion laser operating at a wavelength of 488 nm. The system employs low-angle optics and performs multi-angle darkfield inspection to capture scattered light from surface particles.[2][3][5]
The operating software for the system is Windows 98. The system handles wafers via a single puck mechanism that transfers wafers from a single cassette or platform.[2][3]
The KLA Surfscan 6420 measures particles on polished silicon surfaces, epitaxial layers, and thin films including oxide, nitride, and polymer or resist layers. The system can detect particle sizes from 0.15 µm to greater than 3 µm.[1]
Decommissioned at DTU Nanolab
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The system uses a 30 mW argon-ion laser operating at a wavelength of 488 nm.[2][3]
The system can measure particles from 0.15 µm to greater than 3 µm on polished silicon.[1]
The following facts about the Surfscan 6420 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6420 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6420 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6420 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6420 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the Surfscan 6420 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
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Last updated Sep 28, 2026.