KLA
Surfscan SP 1 DLS BSIM Particle Defect
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What is it?
Applications
Unpatterned surface inspection systems of this class are used in wafer manufacturing, wafer reclaim, and semiconductor materials production to monitor defect density. The system can be configured with a single FOUP/FIMS handler for 300mm wafer automation. The real-time defect classification capability helps identify the nature of detected particles and surface anomalies.[2]
What do the numbers mean?
Wafer handling2
Optics & imaging2
Control & software1
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the defect sensitivity of the KLA Surfscan SP1 DLS?
The SP1 DLS has a defect sensitivity of 0.050 micrometers on polished bare silicon.[2]
What wafer sizes does the SP1 DLS support?
The SP1 DLS is configured for 200/300mm wafers when equipped with a 300mm single FOUP/FIMS handler.[2]
What defect classification capability does the SP1 DLS have?
The system includes RTDC (Real Time Defect Classification) for automatic defect classification during inspection.[2]
What type of wafer surface is the SP1 DLS designed to inspect?
The SP1 DLS is an unpatterned surface inspection system, with enhanced sensitivity for rough films.[2]
Not publicly documented
The following facts about the Surfscan SP 1 DLS BSIM Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 DLS BSIM Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 1 DLS BSIM Particle Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan SP 1 DLS BSIM Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan SP 1 DLS BSIM Particle Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan SP 1 DLS BSIM Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]classoneequipment.com — classoneequipment.comclassoneequipment.com
Last updated Sep 29, 2026.
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