Waferpedia

KLA

TP 500 Implant Dose Measurement

The KLA / Therma-wave TP 500 is an implant dose measurement tool used in ion implantation. The TP 500 operates on single phase power at 120 V, 50/60 Hz, with a circuit breaker of 20 and full current load of 7.5.[1][2]

TP 500 Implant Dose Measurement — Inventory photo
Fig. 01TP 500 Implant Dose MeasurementInventory photo[2]

Power

Single Phase[2]

Optics

Camera Only[8]

What it is

The KLA / Therma-wave TP 500 is an implant dose measurement tool used in ion implantation.[2][8][3][1][9]

What do the numbers mean?

Power & electrical5

Single Phase[2]
Accurate?
50/60 HZ[2]
Accurate?
Voltage
120 V[2]
Accurate?
Power Configuration
Single Phase[2]
Accurate?
Frequency
50/60 Hz[2]
Accurate?

Wafer handling1

Wafer Size
200 mm[9]
Accurate?

Optics & imaging2

Camera Only[8]
Accurate?
Optics Configuration
Camera Only[8]
Accurate?

Configuration & options4

Circuit Breaker
20[2]
Accurate?
Full Current Load
7.5[2]
Accurate?
Refurbished[3]
Accurate?
Circuit Breaker Rating
20[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationSingle Phase[2]
  • Configuration50/60 HZ[2]
  • Voltage120 V[2]
  • Power ConfigurationSingle Phase[2]
  • Frequency50/60 Hz[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the KLA / Therma-wave TP 500 used for?

The TP 500 is used for implant dose measurement in ion implantation.[1][9][2][8][3]

What are the make and model of the TP 500?

The make is KLA / Therma-wave and the model is TP 500, with an associated KLA-Tencor designation.[2][8][3][1][9]

What electrical configuration does the TP 500 run on?

The TP 500 runs on single-phase power at 50/60 Hz and a voltage of 120 V, with a circuit breaker rating of 20 and a full current load of 7.5.[2][1]

Not publicly documented

The following facts about the TP 500 Implant Dose Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TP 500 Implant Dose Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the TP 500 Implant Dose Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the TP 500 Implant Dose Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the TP 500 Implant Dose Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the TP 500 Implant Dose Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (9)Every fact above is drawn from these public sources
  1. [1]TP 500 Implant Dose Measurement — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
  8. [8]inventory listing
  9. [9]fabsurplus.com — fabsurplus.comfabsurplus.com
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Last updated Sep 29, 2026.

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