KLA
Zeta 20 3D
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA Zeta 20 3D is a 3D laser microscope. The KLA Zeta 20 3D is a fully integrated microscope-based system that provides 3D imaging and metrology capability. The KLA Zeta 20 3D software can be used to ascertain dimensional and roughness information.[1]
What it is
The Zeta 20 3D is a fully integrated microscope-based system for three-dimensional imaging and metrology.[1]
How it works
The Zeta 20 3D scans a sample through a user-specified vertical range and records the XY location and precise Z height of pixels at each position.[1]
The Zeta 20 3D uses that height information to form a true-color three-dimensional image and a two-dimensional composite image.[1]
The Zeta 20 3D uses a CCD camera, a Zeta optics module, a precision Z-drive mechanism, a control box, a substrate holder, and a computer system with imaging and analysis software.[1]
Where it fits in the process flow
The Zeta 20 3D fits in inspection and metrology workflows where surface topography, step height, roughness, and lateral dimensions must be measured on prepared samples.[1]
The Zeta 20 3D is used after a sample is placed on the stage and focused for a scan, and it produces measurement data for analysis rather than altering the wafer or specimen.[1]
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- The Zeta 20 3D software notes a "Markers Bug" among commonly observed errors.
- The Zeta 20 3D software notes that a white and green screen can appear on startup among commonly observed errors.
What do the numbers mean?
Optics & imaging5
Dimensions & facilities1
Configuration & options1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does the Zeta 20 3D measure?
The Zeta 20 3D measures step height, roughness, waviness, and lateral dimensions.[1]
What kind of image outputs does the Zeta 20 3D produce?
The Zeta 20 3D produces a true-color three-dimensional image and a two-dimensional composite image.[1]
Can the Zeta 20 3D measure transparent films?
The Zeta 20 3D has an optional film thickness module for calculating transparent layer thicknesses on a surface.[1]
What surfaces can the Zeta 20 3D image well?
The Zeta 20 3D can image surfaces with very low reflectivity and very high roughness.[1]
Not publicly documented
The following facts about the Zeta 20 3D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Zeta 20 3D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Zeta 20 3D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Zeta 20 3D are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Zeta 20 3D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Zeta 20 3D are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]ncpre.iitb.ac.in — ncpre.iitb.ac.inncpre.iitb.ac.in
- [2]Equipment inventory listing
Last updated Oct 6, 2026.
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