Lam Research
2300 Kiyo EX
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam Research 2300 Kiyo EX is a polysilicon etch tool. The Lam Research 2300 Kiyo EX is configured for 300 mm wafers. The Lam Research 2300 Kiyo EX is etch/ash/clean plasma processing equipment.[1][2]
What it is
How it works
General reference — not yet source-verifiedAn etch system removes selected material from a wafer by exposing the surface to a controlled plasma environment while masking regions that must remain intact.
A plasma processing tool uses process chambers, gas delivery, vacuum conditions, and electrical power to sustain reactive species that drive material removal and pattern transfer.
Where it fits in the process flow
General reference — not yet source-verifiedThe Lam Research 2300 Kiyo EX sits in the pattern transfer portion of semiconductor fabrication after lithographic definition and before later clean, deposition, or thermal steps.
A polysilicon etch system is used when a patterned polysilicon layer must be opened or shaped without removing protected regions.
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Dry pumps and customer provided items not included.
- Asset HDD not included.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- System power rating208 AC 3-Phase[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size is the 2300 Kiyo EX configured for?
What is the system power rating of the 2300 Kiyo EX?
The system power rating is 208 V AC, 3-phase.[2]
What vendor supplies the N2 load ports on the 2300 Kiyo EX?
The N2 load ports are supplied by JUSTEM.[2]
How many load ports does the 2300 Kiyo EX have?
The system has three load ports.[2]
Not publicly documented
The following facts about the 2300 Kiyo EX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 Kiyo EX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 Kiyo EX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 Kiyo EX are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 2300 Kiyo EX is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2300 Kiyo EX are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]macquarie.com — macquarie.commacquarie.com
- [3]Lam Research 2300 Kiyo Ex Chamber Only - Used Industrial Equipment — spwindustrial.comspwindustrial.com
- [4]LAM Research 2300 KIYO EX Polysilicon Etch for sale — fabsurplus.comfabsurplus.com
Last updated Oct 2, 2026.
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