Lam Research
AE 480
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam AE 480 is an etch tool by Lam Research.[1]
What it is
How it works
General reference — not yet source-verifiedAn etch tool removes selected material from a wafer by exposing the surface to a controlled plasma or other reactive process so patterned regions are transferred into the underlying film stack.
An etch system in this class typically works with a resist pattern that protects some areas while exposed areas are chemically and physically removed, leaving the desired feature geometry on the wafer.
Where it fits in the process flow
General reference — not yet source-verifiedThe AE 480 sits in the pattern-transfer portion of semiconductor fabrication after lithography has defined the mask pattern on the wafer.
The AE 480 is used before later process steps that complete or preserve the etched structure, such as strip, clean, deposition, or further patterning operations.
Applications
General reference — not yet source-verifiedThe AE 480 is used for semiconductor etch applications that require selective material removal on patterned wafers.
The AE 480 belongs to the general class of tools used to form features in thin films and device layers during wafer fabrication.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the AE 480 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the AE 480 are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AE 480 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AE 480 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AE 480 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AE 480 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]AE 480 — Lam Research | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [2]Inventory photo
Last updated Oct 4, 2026.
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