Lam Research
Kiyo 45
What it is
How it works
What do the numbers mean?
Power & electrical4
Vacuum & pumping10
Wafer handling2
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- MKS E28B-30200 Process Vacuum Gauge0.1 Torr[1]
- MKS 625A-14059 Chamber Vacuum Gauge1 Torr[1]
- MKS D24B12TCECB0 Micro Wave Vacuum Gauge100 Tor[1]
- ConfigurationEdwards SCU 1500 Turbo Pump[1]
- ConfigurationEdwards SCU 1600 Turbo Pump Controller[1]
- ConfigurationLam 3156110-214 Bias RF Generator[1]
- ConfigurationLam 3156110-313 TCP RF Generator[1]
- Process Vacuum GaugeMKS E28B-30200, 0.1 Torr[1]
- Chamber Vacuum GaugeMKS 625A-14059, 1 Torr[1]
- Micro Wave Vacuum GaugeMKS D24B12TCECB0, 100 Torr[1]
- Turbo PumpEdwards SCU 1500[1]
- Turbo Pump ControllerEdwards SCU 1600[1]
- Bias RF GeneratorLam 3156110-214[1]
- TCP RF GeneratorLam 3156110-313[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Kiyo 45 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kiyo 45 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Kiyo 45 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kiyo 45 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Kiyo 45 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Kiyo 45 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Reliant-Ätzprodukte - Lam Research — lamresearch.com (Feb 13, 2026)web.archive.org
Last updated Oct 2, 2026.
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