Lam Research
Rainbow 4420
Plate 01Lam Research Lam Rainbow 4400 4500 4600 4420 4520 4620 4720 plasma etcher semiconductor equipment
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How it works
What do the numbers mean?
Power & electrical1
Vacuum & pumping6
Wafer handling4
Control & software5
- Factory Interface SMIF (2)[1]
Configuration & options13
Vintage & configurations
- 1994Vintage year[1]
1994 vintage
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Rainbow 4420 Plasma Etcher, 8" | — | 1994 | 8-inch wafer size; Envision 1.5 software; CIM SECS; process CMOS; Harmonics Arm (2); SMIF (2); LL Pump; TCU 2080; AC Rack; PC Pump; 208 volts. | Equipment inventory listing[1] |
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Nordson March AP 1000— Same function class: Etch, nullCompare in depthsource[5]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- wet_etch_121500.pdfDocumentumd.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Rainbow 4420 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the Rainbow 4420 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4420 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4420 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Rainbow 4420 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (8)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Inventory photo
- [3]inventory listing
- [4]inventory listing
- [5]Equipment inventory listing
- [6]WO2012083604A1 - Semiconductor device manufacturing method - Google Patents — patents.google.compatents.google.com
- [7]WO2012083603A1 - Planarizing method of interlayer dielectric layer - Google Patents — patents.google.compatents.google.com
- [8]wet_etch_121500.pdf — nanocenter.umd.edunanocenter.umd.edu
Last updated Sep 24, 2026.
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