Lam Research
SEZ 323 Spin
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam / SEZ 323 Spin Etcher is a spin etcher used for etching processes. The Lam / SEZ 323 Spin Etcher supports 8-inch and 12-inch wafer sizes. The Lam / SEZ 323 Spin Etcher is equipped with two chambers.[1][2][3][4]
Wafer size
Single wafer
Power
400 VAC[2]
What it is
Where it fits in the process flow
General reference — not yet source-verifiedSpin etchers occupy the wet-chemical segment of wafer fabrication, alongside batch immersion tools. Single-wafer spin processors are chosen for processes requiring uniform, repeatable etching of each individual wafer. Typical placements in the process flow include stripping films from the back side of a wafer and relief etching for wafers that have been thinned.
What do the numbers mean?
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Lam / SEZ 323 Spin Etcher | — | 2002–2002 | Listed with vintage year 2002 for asset 142092. | Equipment inventory listing[4] |
| 2002 Vintage | — | 2002–2002 | — | Equipment inventory listing[4] |
| 2005 Vintage | — | 2005–2005 | — | Equipment inventory listing[2] |
| 2006 Vintage | — | 2006–2006 | — | Equipment inventory listing[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the SEZ 323 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEZ 323 Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the SEZ 323 Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SEZ 323 Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SEZ 323 Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SEZ 323 Spin are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]inventory listing
- [3]Equipment inventory listing
- [4]Equipment inventory listing
Last updated Oct 9, 2026.
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