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Laurell

EDC-650-15 B

Resist ProcessingLaurell EDC-650-15 B family
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Laurell EDC-650-15 B is an EDC System spin coater in the 650-series. Laurell EDC-650-15 B has a maximum substrate size of 300mm (9" x 9"). Laurell EDC-650-15 B has a maximum speed of 12000 rpm.[1]

LaurellEDC-650-15 B
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What it is

General reference — not yet source-verified

A spin coater is a resist processing tool used to distribute liquid coatings by controlled rotation of a substrate. The EDC-650-15 B belongs to the class of wafer and substrate coating equipment used before exposure and other patterning steps.

How it works

The EDC-650-15 B is a 650-series EDC system with tabletop, in-deck, and on-deck mounting options. The EDC-650-15 B is specified with a maximum speed of 12000 rpm.[1]

Where it fits in the process flow

General reference — not yet source-verified

A spin coater sits early in a lithography or surface-processing flow, after substrate cleaning and before exposure, bake, or development steps that follow coating. The machine prepares a resist or other liquid film for later pattern transfer.

Applications

General reference — not yet source-verified

A resist processing spin coater is used for applying photoresist and related thin liquid coatings on wafers and other flat substrates. The same class of equipment also serves laboratory and pilot-line coating work on planar parts.

  • Spin coating

What do the numbers mean?

Wafer handling1

Max. substrate size
300mm (9" x 9")[1]
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Control & software1

Controller
650-series[1]
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Configuration & options5

OEM
Laurell[1]
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Model
EDC-650-15 B[1]
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Type
EDC System[1]
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Max. RPM
12000 rpm[1]
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Mounting options
Tabletop, In-Deck, On-deck[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of machine is the EDC-650-15 B?

The EDC-650-15 B is an EDC system spin coater in the 650-series.[1]

What mounting options are specified for the EDC-650-15 B?

The EDC-650-15 B is specified with tabletop, in-deck, and on-deck mounting options.[1]

Not publicly documented

The following facts about the EDC-650-15 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-650-15 B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the EDC-650-15 B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the EDC-650-15 B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EDC-650-15 B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EDC-650-15 B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]images.laurell.com — images.laurell.comimages.laurell.com
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Last updated Oct 7, 2026.

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