Laurell
WS-650-15 B
The Laurell WS-650-15 B is a spin coater with a 650-series controller. The WS-650-15 B supports a maximum substrate size of 300 mm and a maximum rotation speed of 12,000 rpm.[1]
What it is
How it works
The WS-650-15 B uses a 650-series process controller with real-time operator interaction, downloadable firmware revisions, and optional PC-based process management.[2]
The WS-650-15 B is offered with in-deck mounting and on-deck mounting options, and the system can use chucks, adapters, and wafer alignment tools for centering substrates on the vacuum chuck.[1][2]
Where it fits in the process flow
The WS-650 series is used for solvent, base, or acid-based processing, including coating, etching, developing, rinsing-drying, and cleaning.[2]
Applications
The WS-650-15 B is used for coating, etching, developing, rinsing-drying, and cleaning in solvent, base, or acid-based processes.[2]
What do the numbers mean?
Wafer handling2
Control & software1
Configuration & options8
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What substrate sizes does the WS-650-15 B accept?
The WS-650-15 B accommodates up to ø300 mm wafers and 9" × 9" substrates.[1][2][3]
What is the maximum rotational speed of the WS-650-15 B?
The WS-650-15 B has a maximum rotational speed of 12,000 rpm, based on a ø100 mm silicon wafer.[1][2][3]
What mounting options are available for the WS-650-15 B?
The WS-650-15 B supports tabletop, in-deck, and on-deck mounting options.[1]
What process controller does the WS-650-15 B use?
The WS-650-15 B uses the 650-series process controller.[2]
Which process categories are supported by the WS-650 series?
The WS-650 series is used for coating, etching, developing, rinsing-drying, and cleaning in solvent, base, or acid-based processing.[2]
Not publicly documented
The following facts about the WS-650-15 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-15 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the WS-650-15 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WS-650-15 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WS-650-15 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WS-650-15 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
- [2]laurell.com — laurell.comlaurell.com
- [3]WS-650-15B Spin Coater — premier-sols.compremier-sols.com
Last updated Oct 9, 2026.
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The Laurell WS-650-15B is a spin coater in the 650 Series.
