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Leica

ACE600

The Leica ACE600 is a sample coater for scanning electron imaging. The Leica ACE600 is a versatile high-vacuum film deposition instrument for field-effect scanning electron microscope applications. The Leica ACE600 can handle samples up to a maximum 4" diameter.[1]

LeicaACE600
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  • Plate 01How to use the Leica Ace600 coater

    Georgia Electron MicroscopyWatch on YouTube
  • Plate 02Leica EM ACE600

    Leica MicrosystemsWatch on YouTube
  • Plate 03Leica EM ACE600 Sputter Coating Workflow

    MWAC EMU videosWatch on YouTube
  • Plate 04Leica EM ACE600 table-top coater with Leica VCT100

    Leica MicrosystemsWatch on YouTube
  • Plate 05In the microscopist's pocket: How to make a coating recipe with the Leica Ace 600 coater

    Georgia Electron MicroscopyWatch on YouTube

What it is

The Leica ACE600 is a sample coater used for scanning electron microscope (SEM) sample preparation.[2][3][1]

The Leica ACE600 is a versatile high vacuum film deposition instrument for field-effect scanning electron microscope (FE-SEM) applications.[1]

Leica Microsystems is the vendor of the Leica EM ACE600 model.[1]

How it works

The system uses a high vacuum environment and employs a quartz crystal thickness monitor or timed deposition to control film thickness.[1]

The stage holder is configured for pin-style SEM stubs.[1]

Where it fits in the process flow

The Leica ACE600 can handle samples mounted on aluminum SEM stubs or unmounted samples up to a maximum diameter of four inches.[1]

Applications

General reference — not yet source-verified

The Leica ACE600 deposits thin conductive films onto non-conductive or poorly conductive samples to prevent charging and improve SEM image quality.

  • SEM sample imaging
  • FE-SEM applications

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • A thin conductive film can improve SEM image quality on samples where charging is an issue, without obscuring underlying surface features.

What do the numbers mean?

Vacuum & pumping2

Purpose
Versatile high vacuum film deposition instrument for field-effect scanning electron microscope (FE-SEM) applications[1]
Accurate?
Purpose
Versatile high vacuum film deposition instrument for FE-SEM applications[1]
Accurate?

Configuration & options12

OEM
Leica[1]
Accurate?
Model
Leica EM ACE600[1]
Accurate?
Deposition type
Sputter coater[1]
Accurate?
Deposited material
Thin films of iridium[1]
Accurate?
Sample capacity
Samples mounted on aluminum SEM stubs or unmounted samples[1]
Accurate?
Maximum sample diameter
4"[1]
Accurate?
Stage holder configuration
Pin-style SEM stubs[1]
Accurate?
Optional features
Quartz crystal thickness monitor or timed deposition[1]
Accurate?
OEM
Leica Microsystems[1]
Accurate?
Use
Deposition of thin films of iridium prior to SEM sample imaging[1]
Accurate?
Stage holder
Configured for pin-style SEM stubs[1]
Accurate?
Deposition monitoring
Optional quartz crystal thickness monitor or timed deposition[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • PurposeVersatile high vacuum film deposition instrument for field-effect scanning electron microscope (FE-SEM) applications[1]
  • PurposeVersatile high vacuum film deposition instrument for FE-SEM applications[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What materials can the Leica ACE600 deposit?

The Leica ACE600 can deposit gold, palladium, carbon, chromium, and iridium.[2][3][1]

What is the maximum sample size the Leica ACE600 can accommodate?

The Leica ACE600 can handle samples up to four inches in diameter.[1]

How is film thickness controlled on the Leica ACE600?

Film thickness is controlled using an optional quartz crystal thickness monitor or timed deposition.[1]

What type of vacuum does the Leica ACE600 use?

The Leica ACE600 uses a high vacuum environment.[1]

What is the purpose of the Leica ACE600 in SEM imaging?

The Leica ACE600 deposits a thin conductive film (typically less than ten nanometers) to reduce sample charging and improve SEM image quality without obscuring surface features.[1]

Not publicly documented

The following facts about the ACE600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACE600 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ACE600 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ACE600 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the ACE600 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the ACE600 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]uwaterloo.ca — uwaterloo.cauwaterloo.ca
  2. [2]https://www.nanofab.utah.edu/wp-content/uploads/2022/08/tool-list.pdf — nanofab.utah.edunanofab.utah.edu
  3. [3]https://www.nanofab.utah.edu/wp-content/uploads/2025/07/Utah-Nanofab-tool-list-July-2025-1.pdf — nanofab.utah.edunanofab.utah.edu
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Last updated Oct 3, 2026.