LEO
1450 VP
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The LEO 1450 VP is a variable-pressure scanning electron microscope (VP-SEM). The platform supports both standard high-vacuum and variable-pressure imaging modes. The system includes a mounted EDAX energy-dispersive X-ray spectroscopy (EDS) detector. The instrument is equipped with a KE Development Type 200 four-quadrant backscattered electron (BSE) detector system. The column and chamber form the main optical platform. The LEO 1450 VP is categorized as a metrology and inspection tool.[1][4][2]
Where it fits in the process flow
General reference — not yet source-verifiedThe LEO 1450 VP is used in metrology and inspection workflows within semiconductor fabrication, materials science, and failure analysis laboratories. The instrument examines the surface morphology and elemental composition of samples at micro- and nanoscale dimensions. Scanning electron microscopes of this class are typically deployed after processing steps to inspect features, defects, or contaminants, or as standalone analytical tools in R&D and quality assurance environments. The variable-pressure capability allows the tool to analyze non-conductive or uncoated specimens that cannot withstand high vacuum, broadening its applicability to a wider range of process steps.
What do the numbers mean?
Power & electrical1
Vacuum & pumping3
Optics & imaging6
Dimensions & facilities2
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 1450 VPSE | — | — | Includes EDAX EDS microanalysis detector and four-quadrant BSE detector system | Equipment inventory listing[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the resolution of the LEO 1450 VP?
The resolution is 3.5 nm at 30 kV at optimum working distance.[2]
What acceleration voltage range does the LEO 1450 VP support?
The acceleration voltage range is 0.2 kV to 30 kV.[2]
What are the imaging detectors available on the LEO 1450 VP?
The instrument is equipped with three detectors: a secondary electron detector (SE1), a backscattered electron detector (BSE), and a variable-pressure secondary electron detector (VPSE).[2]
What is the variable-pressure range of the LEO 1450 VP?
The variable-pressure mode can maintain chamber pressures from 1 Pa to 400 Pa.[2]
What is the maximum sample weight for the LEO 1450 VP?
The maximum sample weight is 500 grams.[2]
What elements can be detected by the EDS system on the LEO 1450 VP?
The energy-dispersive X-ray spectrometer detects elements from beryllium to uranium.[2]
Not publicly documented
The following facts about the 1450 VP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1450 VP are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 1450 VP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1450 VP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1450 VP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1450 VP are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]plassmat.cnrs-imn.fr — plassmat.cnrs-imn.frplassmat.cnrs-imn.fr
- [3]semtechsolutions.comsemtechsolutions.com
- [4]1450 VP — LEO | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 22, 2026.
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