MKS
The MKS DA07A is an Absolute Baratron digital capacitance manometer. The DA07A has a full scale pressure range from 1 to 1000 Torr (1.33×10² to 1.33×10⁵ Pa). The DA07A is available unheated or heated to 45°C, 80°C, or 100°C.[1]
The MKS DA07A is an Absolute Baratron digital capacitance manometer.[1]
The DA07A has a full scale pressure range of 133 Pa to 133 kPa, corresponding to 1 to 1000 Torr.[1]
The DA07A is available unheated or heated to 45°C, 80°C, or 100°C.[1]
The DA07A includes both analog output and EtherCAT communications.[1]
The DA07A offers standard, etch/fluorine, or deposition-friendly sensor options.[1]
Digital models like the DA07A provide a direct digital communication interface, here EtherCAT, in addition to a conventional analog output for integration into process control systems.[1]
The DA07A's digital communications capability allows direct integration with modern process tool controllers and fab-wide monitoring systems.[1]
The DA07A is suited for general-purpose absolute pressure measurement in semiconductor process tools, particularly where medium vacuum ranges from 1 to 1000 Torr are encountered.[1]
Sensor options for etch, fluorine, and deposition environments make the DA07A adaptable to aggressive or film-forming process chemistries.[1]
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The following facts about the DA07A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DA07A are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DA07A are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DA07A are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DA07A are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DA07A is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 22, 2026.