ECLIPSE L200N

The Eclipse L200N is part of a series that includes models L200, L200ND, and L200A. The L200N is configured for reflected light (episcopic) illumination only, unlike the L200ND which also provides transmitted light and epi-fluorescence capabilities. The microscope incorporates Nikon's CFI60 LU/L optical system and is designed for inspection of 200 mm wafers and masks. The instrument body is finished with an electrostatic discharge coating to reduce particle adhesion, and the motorized nosepiece uses a shielded motor that contains particles to prevent sample contamination.^[1][2][3]

The episcopic illumination system is built into the main body and uses a 12 V / 100 W halogen lamp. The motorized aperture diaphragm is centerable and includes an optional pinhole slider for centering. A fixed field diaphragm with a focusing target is also fitted. Four removable 25 mm filters (NCB11, ND4, ND16, GIF) can be placed in the optical path. The polarizer and analyzer are mounted on sliders for easy insertion and removal. The motorized nosepiece is a fixed-motorized sextuple universal type with a slot for DIC attachment. The eyepiece tube is a trinocular tilting type (L2TT) with an adjustable tilt angle from 0° to 30°, a field of view of 25 mm, and a two-way optical path changeover (100:0 or 0:100 between binocular and photo port). The fixed-position X-Y fine-movement controls remain close to the operator regardless of stage position.^[2][4][3]

The focus mechanism provides a coarse travel of 29 mm total, with coarse focus knob rotation of 12.7 mm per revolution (torque adjustable and equipped with a refocusing mechanism). Fine focus is 0.1 mm per revolution in 1 μm increments. The 8×8 inch stage has a stroke of 205×205 mm and supports coarse/fine movement changeover. The instrument has a mass of 43.75 kg when configured with the 8×8 stage and L2TT eyepiece tube.^[2][4][3]